A Measuring Method for Alternate Incremental Measuring Micro Displacement Sensor

Abstract

The invention discloses a novel alternative incremental sensor for measuring the micrometric displacement. The novel alternative incremental sensor comprises a laser beam, a fixed reflecting mirror, a movable reflecting mirror, a detection reflecting mirror, a photoelectric detector I, a photoelectric detector II and a processing system. In operation of the sensor, the laser beam is continuously reflected to the reflecting mirrors in the fixed reflecting mirror and the movable reflecting mirror which are parallel, and finally irradiates onto the two groups of photoelectric detectors, and the reflecting path of the laser beam can be changed when the distance between the fixed reflecting mirror and the movable reflecting mirror is changed; the laser beam is induced for multiple times by three detection parts on each group of photoelectric detector, the processing system obtains a detection distance value according to the laser-beam induction times and the laser induction sequence of each group of detection parts and the distance processing among the detection parts, and then can calculate out a real change value of the distance between the fixed reflecting mirror and the mobile reflecting mirror by the detection distance value; the novel alternative incremental sensor is simple in structure, reliable in measurement, higher in accuracy and easy in implementation of batch manufacture.

Description

technical field [0001] The invention relates to the field of precision measurement technology and instruments, in particular to an alternating incremental measurement micro-displacement sensor and a measurement method. Background technique [0002] Displacement sensor is a commonly used geometric quantity sensor, which is widely used in many fields such as aerospace, industrial production, machinery manufacturing and military science. There are many ways to measure displacement. Smaller displacements (such as less than 1cm) are usually detected by strain gauges, inductances, differential transformers, eddy currents, and Hall sensors. Larger displacements (such as greater than 1cm) are usually detected by induction synchronization. Sensors, gratings, capacitive grids, magnetic grids and other sensing technologies to measure. Among them, the grating sensor has the advantages of easy digitalization, high precision (currently the highest resolution can reach the nanometer level...

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Problems solved by technology

[0005] The purpose of the present invention is to: aim at the existing grating sensors existing in the prior art due to the physical structure limitation of the photolithography process, which makes it difficult to improve the measurement accuracy and cannot meet the above-mentioned shortcomings of the increasingly high measurement accuracy requirements, and provides An alternating incremental measuring micro-displacement sensor and its measuring method. The sensor has a simple structure, is suitable for measuring the displacement change of a measured object, has reliable measurement, high precision, and is easy to realize mass production.

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