An eddy current displacement sensor and its implementation method

Abstract

The invention discloses a wide-range high-precision high dynamic response eddy current displacement sensor and an implementation method. The sensor comprises an AC resonance boosting bridge, a fixed amplitude circuit, an amplitude compensating and adding circuit, an orthogonal sampling trigger signal generation circuit and a high speed sampling processor. The method comprises following steps: performing dual-path data sampling through a dual-path sampling method and calculating loss resistance of the resonance circuit according to the dual-path sampling data (S1, S2); calculating coil displacement according to the circuit loss; calculating displacement temperature drift after temperature compensation according to temperature S3. According to the invention, the sensitivity and measurement range of the sensor are increased by coil boosting, fixed amplitude excitation, and amplitude compensating; external disturbance is reduced and dynamic response and stability are increased by orthogonal sampling and digital processing.

Description

technical field [0001] The invention relates to a large-scale, high-precision, high-dynamic-response eddy current displacement sensor, which is widely used in displacement and vibration measurement, and is also suitable for production line state monitoring. Background technique [0002] The basic principle of this type of sensor is that when the coil emitting the alternating electromagnetic field is close to the metal, there will be an eddy current effect. The closer the distance between the coil and the metal surface, the greater the loss. When other factors remain unchanged, the distance between the sensor and the metal surface can be measured by measuring the loss. [0003] At present, the linear range of the eddy current displacement sensor is only half of the probe diameter; within the measurement range, the output signal of the inductance probe has a small variation range and low sensitivity; the absolute value detection of the diode is adopted, and the anti-interferen...

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Problems solved by technology

[0003] At present, the linear range of the eddy current displacement sensor is only half of the probe diameter; within the measurement range, the output signal of the inductance probe has a small variation range and low sensitivity; the absolute value detection of the diode is adopted, and the anti-interference is low; and a large number of internal integrated Analog devices, causing severe temperature drift, complex systems and other shortcomings

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