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Biological tin/ag nano-multilayer film prepared by magnetron sputtering technology and its application

A nano-multi-layer and multi-layer film technology, which is applied in the field of bioengineering thin films and biomedical materials, can solve the problems that have not been found in the research of nano-multi-layer films, and achieve high hardness, high film-base binding force, and good biocompatibility Effect

Inactive Publication Date: 2018-02-09
TIANJIN NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Deposition of TiN and Ag ions on titanium alloy (Ti6Al4V) substrates is likely to solve the above problems to a certain extent, but regarding TiN / AgN 3 The study of nano-multilayer films has not found

Method used

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  • Biological tin/ag nano-multilayer film prepared by magnetron sputtering technology and its application
  • Biological tin/ag nano-multilayer film prepared by magnetron sputtering technology and its application
  • Biological tin/ag nano-multilayer film prepared by magnetron sputtering technology and its application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Synthesis of TiN / Ag nano-multilayer film by changing modulation ratio combined with substrate temperature conditions:

[0036] (1) Before the experiment, the titanium alloy (Ti6Al4V) substrate polished on one side was ultrasonically cleaned for 15 min with acetone and absolute alcohol in sequence, and then put into the magnetron sputtering coating chamber after drying.

[0037] (2) Vacuum the chamber so that the background vacuum in the chamber is 2.9×10 -4 Pa~3.0×10 -4 Pa.

[0038] (3) Adjust the flapper valve so that the working air pressure is 4 Pa, control the Ar intake flow rate with a mass flow meter to keep it at 40 sccm, turn on the bias power supply, adjust the base bias voltage to -400 V, and the current meter is normal , bombard and clean the sample with Ar ions for at least 15 min, and turn off the bias power.

[0039] (4) Turn on the radio frequency power supply, control the Ar intake flow rate with a mass flow meter to keep it at 40-41 sccm, adjust th...

Embodiment 2

[0053] The application direction of biological TiN / Ag nano-multilayer film: intervertebral cage, dental implant and other biomedical materials.

[0054] As a biomedical material, such as an intervertebral fusion device, in the process of repairing the human spine, it must not only have a certain degree of compression resistance, but also need to take into account good tissue compatibility, non-toxicity, and minimize the content of the spine. Repulsion of osteoblasts and myocytes. The titanium alloy (Ti6Al4V) material has high hardness, wear resistance and good biocompatibility, so it has been widely used as a medical material. However, titanium alloy itself still has some limitations, biocompatibility needs to be further improved, and hardness and wear resistance can be further improved to meet the growing demand.

[0055] Using the magnetron sputtering (MS) method to deposit biological TiN / Ag nano-multilayer films on the surface of medical materials can not only improve the ...

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Abstract

The invention relates to a TiN / Ag nanometer multilayer film with the surface rich in silver and doped with nitrogen. According to the film, the radio frequency magnetron sputtering technology is first utilized for studying the influence of all technological parameters on a single layer of the TiN / Ag film in an N2 environment, and it is found that main factors for hardness are the modulation ratio and sputtering power of Ag; next, the TiN / Ag multilayer structure is subjected to experimental design and experiment, wherein at the optimal ratio, that is, the modulation period is 35 nm and the modulation ratio of TiN to Ag is 6:1, the template effect of TiN is utilized for obtaining stable-phase Ag, and finally the TiN / Ag multilayer structure film with the nanometer hardness up to 22.7 GPa is obtained. The TiN / Ag nanometer multilayer film has excellent comprehensive characteristics including high harness, high film-substrate bonding force, good hydrophilia and biocompatibility. The biological TiN / Ag nanometer multilayer film will have an important application prospect in the technical fields of biomedical materials and bioengineering films.

Description

[0001] The invention was funded by the National 863 Program (2015AA034702) and the National Natural Science Foundation of China (51472180, 51272176). technical field [0002] The invention belongs to the fields of biomedical materials and bioengineering films. In particular, it involves a high-vacuum magnetron sputtering system (MS) to prepare biological TiN / Ag nano-multilayer films, using magnetron sputtering technology to synthesize biological nano-multilayer surfaces composed of titanium nitride and silver trinitride New process for strengthening thin films. Background technique [0003] Titanium is an important structural metal and is considered as a rare metal. It was developed in the 1950s. Because of its excellent comprehensive performance, it is known as the all-round metal in the kingdom of metal materials. It is regarded as the successor to iron, Aluminum is the third and strategic metal in development after aluminum. Titanium is non-toxic, and titanium has excel...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/06
CPCC23C14/0641C23C14/165C23C14/352C23C28/322C23C28/34
Inventor 李德军潘玉鹏董磊余建刚李春曹叶万荣欣顾汉卿
Owner TIANJIN NORMAL UNIVERSITY
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