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Phase-shift interference information processing method based on error compensation

An information processing method and phase-shifting interference technology, which is applied in the field of phase-shifting interference information processing based on error compensation and phase-shifting interference information processing, can solve the problem of inability to suppress the instability of the light source light intensity, the inability to effectively suppress the instability and vibration of the light source, etc. problem, achieve the effect of eliminating influence, promoting application and improving repeatability

Inactive Publication Date: 2016-04-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This algorithm has a good ability to suppress the phase shift error, but it cannot effectively suppress the instability and vibration of the light source.
ShouhongTang proposed a non-equally spaced five-step phase shift algorithm with a known amount of phase shift. This algorithm can effectively suppress the phase shift error, but it cannot suppress the instability of the light intensity of the light source.

Method used

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  • Phase-shift interference information processing method based on error compensation
  • Phase-shift interference information processing method based on error compensation
  • Phase-shift interference information processing method based on error compensation

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Embodiment Construction

[0059] Aiming at the 632.8nm phase-shifting interferometer, the implementation method of this method is given in combination with the specific error form.

[0060] The first step is to determine the hardware performance and obtain the sensitivity equation based on the hardware performance

[0061] 1. The phase-shifting interferometer has linear phase-shifting errors and second-order nonlinear phase-shifting errors. Using equation (9) of the Summary of the Invention, the following sensitivity equation can be obtained:

[0062] Δ φ = cos 2 ( φ ) X n = 1 N w n sin 2 ( δ n ) { ϵ 1 ( n - 1 ) δ + ϵ 2 [ ( n - 1 ) δ ] 2 } + sin 2 ( φ ) X n = 1 N w n cos 2 ( δ n ) { ϵ 1 ( n - 1 ) δ + ϵ 2 [ ( n - 1 ) δ ] 2 } + 2 sin ( φ ) cos ( φ ) ...

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Abstract

The invention relates to a phase-shift interference information processing method based on error compensation, and belongs to the technical field of optical detection and digital information processing. The method detects the sensitivity equation of a random error source to phase-shift interference measurement based on phase-shift laser interference, obtains a constraint equation set through adding a to-be-determined weight to a least square method, and determines a weight through solving the constraint equation set, thereby determining the phase-shift interference information processing method which is not sensitive to the error source. The method is based on the thought of error compensation, can eliminate the impact on phase-shift interference detection from various types of error sources, remarkably improves the repeatability, reproducibility and precision of a phase-shift laser interferometer, and facilitates the application of the technology of the phase-shift laser interferometer in high-precision optical detection.

Description

Technical field [0001] The invention belongs to the technical field of optical detection and digital information processing, and specifically relates to a phase-shift interference information processing method based on error compensation, and is mainly applied to phase-shift interference information processing. Background technique [0002] With the development of modern optical technology, high-precision optical systems have put forward higher and higher requirements for optical processing and optical inspection. The traditional interference information processing method is the fringe tracking method, which calculates the measured by directly judging the center of the interference fringe and determining its serial number. Due to the accuracy of fringe judgment and the degree of fluctuation of the wave surface to be measured, this method has limited accuracy and cannot meet the requirements of high-precision optical detection. [0003] Since Bruning proposed phase-shifting interfe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02056
Inventor 于杰张海涛马冬梅
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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