A thin film pressure transducer and a manufacturing method thereof

Abstract

The invention discloses a thin film pressure transducer and a manufacturing method thereof. The thin film pressure transducer comprises a pedestal and a sensitive core body. A pressure guiding hole is arranged in the pedestal. A buffer assembly used for transmitting a medium pressure and obstructing transmission of medium temperatures is also arranged between the pedestal and the sensitive core body. The manufacturing method comprises the following steps: S1, the pedestal, a sealing membrane and a buffer main body with a through hole are fixedly connected to the sensitive core body from the bottom up; the sensitive core body and the sealing membrane enclose the through hole to form a sealed cavity; S2, the temperature buffer medium is injected into the sealed cavity through a medium guiding hole, and a sealing member is used to seal the medium guiding hole; and S3: wire leading is carried out on the sensitive core body to obtain the thin film pressure transducer. The thin film pressure transducer is advantaged by being little influenced by the medium temperature, resistant to an instantaneous temperature impact, etc.

Description

technical field [0001] The invention belongs to the field of pressure sensors, in particular to a thin-film pressure sensor and a manufacturing method thereof. Background technique [0002] The sensitive core of the thin-film pressure sensor is manufactured by modern thin-film technology, that is, using magnetron technology or ion beam sputtering technology, insulating materials and resistive materials are deposited on the elastic stainless steel diaphragm in molecular form. A molecularly bonded insulating film and a resistive material film are formed on the surface of the diaphragm, and are integrated with the elastic stainless steel diaphragm. After photolithography, resistance adjustment, temperature compensation and other processes, the film is processed to form a firm and stable Wheatstone bridge, which completes the preparation of the sensitive core. When the pressure of the measured medium acts on the pressure sensitive core, the Wheatstone bridge will generate a wea...

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Problems solved by technology

[0004] However, the applicant found during the use of the existing thin-film pressure sensor that when the temperature of the measured pressure medium deviates from room temperature, the pressure measurement value often deviates from the actual value, and the more the temperature of the measured pressure medium deviates from room temperature, the greater the deviation

Moreover, the existing thin-film pressure sensors have limited ability to withstand instantaneous temperature shocks, and instantaneous high temperature or instantaneous low temperature may damage the sensitive core.

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