discharge lamp

A technology for discharge lamps and discharge tubes, which is applied in the manufacture of discharge tubes/lamps, parts and circuits of gas discharge lamps, and can solve problems such as increased manufacturing costs, complex grain boundaries, and complex shapes at the front end of electrodes

Active Publication Date: 2019-09-10
ORC MFG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the electrode manufacturing process, adjusting the number of grain boundaries involves complicated work
In addition, if the protrusion is formed on the tapered portion, the shape of the electrode tip becomes complicated, resulting in an increase in manufacturing cost

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] The discharge lamp of this embodiment is composed of a cathode, and two metal members are joined by SPS bonding. The cathode is made of thoriated tungsten as a front metal member and molybdenum as a rear metal member. In the SPS bonding apparatus, using an SPS apparatus manufactured by SPSSyntex Co., Ltd., a pressure of 45 MPa was applied from both sides of the metal member in a vacuum environment, and the sintering temperature near the bonding surface was maintained at 1500° C. for 10 minutes to perform solid phase bonding.

[0068] The axial length of the metal part on the front end is 3mm, the cathode diameter is 20mm, and the cathode is 42mm in total length. Modeling is performed, and the heat applied to the junction when the discharge lamp is lit is performed by a computer based on the heat assumed at the time of power 12.5kW. Simulation of stress near a face. As a result of the simulation, it was confirmed that during lighting of the discharge lamp, stress was con...

Embodiment 2

[0070] In Example 2, three types of cathodes were modeled in which the axial lengths of the metal parts on the tip side were 3mm, 5mm, and 7mm, and the temperature distribution when the discharge lamp was lit was reproduced, and the displacement of the tip of the electrode during lighting was calculated. amount (expansion). The amount of displacement here refers to the distance from the axis of the electrode (refer to image 3 The amount of change in shape of the label ST) (refer to image 3 label G). In addition, it is the same specification as the said Example 1 except the axial length of the front-end|tip side metal member. As a comparative example, a cathode (axial length: 42 mm) integrally formed of only tungsten without joining metal members was used.

[0071] Image 6 This is a graph of the displacement amount of the electrode tip.

[0072] Such as Image 6 As shown, it can be seen that the front end displacement (ratio) of the three kinds of cathodes in which the...

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Abstract

Provided is a discharge lamp which can stabilize arc discharge to restrain illumination change in a discharge lamp which forms electrodes by jointing different metal parts. In a short arc type lamp (10) with a cathode (20) and anode (30), a metal component (22) formed by thoriated tungsten, and a metal component (24) having the thermal expansion coefficient greater than the metal component (22) and formed by molybdenum are jointed to form the cathode (20) having a joint surface (S) along the electrode axis vertical direction of a tapped portion (20A).

Description

technical field [0001] The present invention relates to a discharge lamp used in an exposure apparatus and the like, and particularly relates to an electrode structure of a high output discharge lamp such as a short-arc discharge lamp. Background technique [0002] In the short-arc discharge lamp, the cathode and the anode are arranged opposite to each other in the discharge tube, and arc discharge is generated by electron emission from the cathode to the anode, and the discharge emits light. During lighting of the lamp, the electrodes are in a high-temperature state (for example, 2000° C. or higher), so tungsten (W) with a high melting point is generally used as an electrode material. [0003] The tip of the electrode is consumed during use, deforming from a shape with edges to a shape with rounded corners. Therefore, the bright point where the arc discharge occurs moves, the arc discharge becomes unstable, and the illuminance decreases and the illuminance fluctuates. In ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J61/04H01J9/02
Inventor 内山满博林武弘早川壮则
Owner ORC MFG
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