High-order resonance type micro-cantilever of atomic force microscope and manufacturing method thereof

Abstract

The invention discloses a high-order resonance type micro-cantilever of an atomic force microscope and a manufacturing method thereof. The high-order resonance type micro-cantilever comprises a fixed end and a free end; and the fixed end and the free end are connected into one, wherein the thickness of the fixed end is larger than that of the free end by d microns. Therefore, the high-order intrinsic mode frequency of the high-order resonance type micro-cantilever is an integral multiple of a basic mode frequency; and the d is a positive rational number. According to the high-order resonance type micro-cantilever and the manufacturing method thereof, coupling of the high-order intrinsic mode frequency and the basic mode frequency is tuned, detection of more frequency signals beyond the basic mode frequency can be realized, and the high sensitivity and resolution ratio can be provided, so that detection and researches on non linearity of the force between the needle point of the high-order resonance type micro-cantilever and a sample as well as more physical properties of the sample can be realized.

Description

technical field [0001] The invention relates to the field of multi-frequency atomic force microscopy, in particular to a high-order resonance type atomic force microscope microcantilever and a manufacturing method thereof. Background technique [0002] Since its invention in 1986, the atomic force microscope has become an important tool in many fields including materials, biology, and nanotechnology. Due to the slow imaging speed of conventional atomic force microscopy, its applications in dynamic process observation, in-situ measurement of industrial production lines, and high-density information storage are limited. Therefore, the rapid development of atomic force microscopy has attracted great attention at home and abroad in recent years. Continuous improvement in spatial resolution, data acquisition speed, and imaging of material properties has long been the goal of atomic force microscopy. The multi-frequency atomic force microscopy (MF-AFM) developed in recent years ...

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Problems solved by technology

[0003] However, the existing atomic force microscopy only excites and detects at the fundamental mode frequency of the microcantilever, and the frequencies outside the fundamental mode frequency are usually higher and the signal intensity is much smaller than the fundamental mode frequency part, so they are all ignored. resulting in the loss of information on the interaction forces contained in the high-frequency part

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