Noncontact six-degree-of-freedom positioning device and method for magnetic levitation planar motor

Abstract

The invention relates to a noncontact six-degree-of-freedom positioning device and method for a magnetic levitation planar motor. The device and the method provided by the invention comprise the processes as follows: a cartesian coordinate system is built on a mover of the magnetic levitation planar motor; a first laser interference measurement device is arranged in an X-axis direction of the cartesian coordinate system; a second laser interference measurement device is arranged in a Y-axis of the cartesian coordinate system; a reflector is arranged on the mover of the magnetic levitation planar motor; a plurality of eddy current transducers are also arranged on the mover of the magnetic levitation planar motor; a horizontal aluminum plate is pasted to the upper surface of a stator of the magnetic levitation planar motor; data are measured through the laser interference measurement devices and the eddy current transducers; and an operation is carried out to obtain a result. Six-degree-of-freedom noncontact position detection device and method applied to a long-stroke magnetic levitation planar motor mover provided by the invention can achieve a long-stroke distance measurement, and is relatively small in interference of external factors, simple in structure and relatively high in accuracy.

Description

technical field [0001] The invention relates to a non-contact six-degree-of-freedom positioning device and method for a magnetic levitation plane motor. Background technique [0002] The magnetic levitation plane motor can greatly simplify the plane motion mechanism, reduce the motion quality, and realize high-speed motion with micron-level precision without friction and wear. Especially in the field of IC lithography machine, it has broad prospects. The structure diagram of the magnetic levitation plane motor is as follows figure 1 As shown, the magnetic levitation plane motor includes a mover (1') and a stator (2'). The simple structure of the magnetic levitation plane motor effectively avoids the elastic deformation of the transmission link in the traditional motor drive system and the movement lag caused by the friction of the supporting parts, and reduces the tracking caused by the transmission system lag during the interpolation movement. error, improve the stabilit...

AI Technical Summary

Problems solved by technology

[0005] 1) Grating ruler: Grating rulers are widely used in high-precision and large-stroke linear displacement measurement, and the measurement resolution can reach sub-nanometer level. The resolution of the latest technology grating ruler introduced by ASML even reaches nanometer level. It is a contact measurement, which is applied to the fully suspended motor mover to directly destroy the motor dynamic model, and also destroy the degree of freedom of the mover movement, resulting in failure of motor control

[0006] 2) Capacitive sensor: The capacitive sensor calculates the measurement distance by checking the capacitance between itself and the measured object. It has the characteristics of high measurement accuracy and high price. The surface roughness of the target directly affects the accuracy of the measurement results

[0007] 3) Laser ranging sensor: The design principle of this sensor is based on the optical triangulation ranging method, with micron-level resolution, but due to the range range, it cannot be applied to large-stroke movements

[0009] 5) Laser interferometry system: The laser interferometry system is mostly used in the large-stroke displacement measurement of lithography machines. It has the characteristics of high response, high stability, and high resolution. It is an ideal equipment for large-stroke nanoscale measurement, but it is expensive , the system structure is complex

However, due to factors such as the manufacturing process, the spatial magnetic field distribution does not fully conform to the calculation results of the analytical model, which causes errors in the actual measurement results of the Hall sensor.

[0011] Due to the various deficiencies in the above-mentioned technical means, there is no one in the existing technology that can not destroy the freedom of motion of the mover, can realize large stroke distance measurement, is less affected by external factors, has a simple structure and low cost, and has high precision. Higher precision position measurement method

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