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Transmission microscopic imaging device and method based on dual-wavelength digital holography technology

A digital holography and microscopic imaging technology, applied in the direction of measuring devices, optical devices, instruments, etc., to avoid the phase unwrapping process, reduce complexity, and improve the effect of phase reconstruction accuracy

Active Publication Date: 2019-07-02
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
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Problems solved by technology

[0004] The purpose of the present invention is to provide a transmission microscopic imaging device and method based on dual-wavelength digital holographic technology to solve the problem of fast phase unwrapping in digital holographic microscopic imaging

Method used

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  • Transmission microscopic imaging device and method based on dual-wavelength digital holography technology
  • Transmission microscopic imaging device and method based on dual-wavelength digital holography technology
  • Transmission microscopic imaging device and method based on dual-wavelength digital holography technology

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Embodiment Construction

[0010] As shown in Figure 1(a), the transmission microscopic imaging device based on the dual-wavelength digital holography technology of the present invention includes a first laser 1, a second laser 17, a first beam splitter 2, a first collecting mirror 3, The first condenser pinhole diaphragm 4, the first condenser lens 5, the first plane mirror 6, the microscope objective lens 8, the lens tube lens 9, the second condenser lens 10, the second condenser pinhole diaphragm 11, the second condenser lens 12, Attenuation sheet 13, second plane mirror 14, second beam splitting mirror 15, camera 16, third plane mirror 18, wherein the first beam splitting mirror 2 divides the laser light emitted by the first laser 1 into two paths, wherein one path of laser light passes through the first set The light mirror 3 converges to the pinhole diaphragm 4 of the first condenser mirror, and the light diverges through the pinhole diaphragm 4 of the first condenser mirror and is collected by the...

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Abstract

The invention discloses a transmission-type microscopic imaging device and method based on the double-wavelength digital holographic technology, and the method comprises the steps: employing the double-wavelength digital holographic technology and two laser beams with different wavelengths to irradiate a to-be-detected sample; collecting two holographic interference patterns in two different color channels at the same time through one color camera; solving wrapping phase diagrams under two wavelengths; carrying out optical unwrapping through employing the two wrapping phase diagrams, and obtaining a non-wrapping phase diagram of the sample. The method carries out digital holographic microscopic imaging, avoids a complex phase unwrapping process, reduces the complexity of subsequent calculation and processing, and improves the phase reconstruction precision.

Description

technical field [0001] The invention belongs to optical measurement and imaging technology, in particular to a transmission microscopic imaging device and method based on dual-wavelength digital holography technology. Background technique [0002] With the wide application of semiconductor devices, micro-optical components, micro-opto-electromechanical systems and other micro-structural components, a measurement method with high resolution, high precision, non-contact, non-destructive and fast characteristics is needed for in-depth detection, such as objects Three-dimensional topography, surface defects, cracks, surface shape errors, etc. In the measurement of object surface topography, digital holographic microscopy has the advantages of non-contact, non-damage, high resolution and rapid processing, especially with the development of semiconductor and microelectronics technology, the continuous improvement of CCD and CMOS performance, and the computer With the development ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B9/04
Inventor 张玉珍孙佳嵩左超冯世杰陈钱顾国华胡岩张良陶天阳李加基张佳琳孔富城林飞张敏亮范瑶
Owner NANJING UNIV OF SCI & TECH
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