Photoresist bottle holding device

Abstract

The invention provides a photoresist bottle holding device. The device comprises a base, a large bottle holder, and a small bottle holder. The large bottle holder is fixedly connected with the base. The large bottle holder is provided with a first supporting surface. The shape of the first supporting surface is matched with the shape of the side wall of a large bottle. The small bottle holder is detachably connected with the first supporting surface of the large bottle holder. The small bottle holder is provided with a second supporting surface used to support a small bottle and a third supporting surface used to contact with the first supporting surface. The shape of the second supporting surface is matched with the shape of the side wall of the small bottle. The shape of the third supporting surface is matched with the shape of the first supporting surface. The dimension of the small bottle is smaller than the dimension of the large bottle. The photoresist bottle holding device is suitable to be use for photoresist bottles in different dimensions.

Description

technical field [0001] The invention relates to a photoresist bottle holding device, in particular to a photoresist bottle holding device which is convenient for switching between large and small photoresist bottles. Background technique [0002] Photoresist is a commonly used liquid formulation in semiconductor processing and is usually stored in a photoresist bottle. When in use, the photoresist bottle is fixed on the photoresist bottle holding device, and the suction pipe clamped by the photoresist bottle fixing device extends into the photoresist bottle to extract the photoresist from the photoresist bottle. [0003] However, commonly used photoresist bottles usually have multiple different sizes, and the structure of the photoresist bottle holding device in the prior art is fixed, and it can only be matched with a photoresist bottle of a certain specific size usually. Ideally used together. When replacing photoresist bottles of different sizes, the photoresist bottle ...

AI Technical Summary

Problems solved by technology

[0003] However, commonly used photoresist bottles usually have multiple different sizes, and the structure of the photoresist bottle holding device in the prior art is fixed, and it can only be matched with a photoresist bottle of a certain specific size usually. Ideally used with

When replacing photoresist bottles of different sizes, the photoresist bottle holding device in the prior art cannot play a better supporting and fixing role, which may cause various problems, such as the photoresist bottle cannot be firmly support, the straw cannot be inserted into the mouth of the bottle, etc.

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