Workpiece transport device

Abstract

The invention aims to shorten the moment of the vertical dimension of a swing arm relative to an arm root and provides a workpiece transport device. The workpiece transport device comprises a support base, a support arm in rotatable connection with a main rotation axis relative to the support base, a hand retaining arm in rotatable connection with an elbow joint axis relative to the support arm, a hand in rotatable connection with the elbow joint axis relative to the hand retaining arm, a support arm motor used for driving the support arm to rotate around the support base and arranged in the support base, a hand retaining arm motor used for driving the hand retaining arm to rotate around the support arm, a hand motor used for driving the hand to rotate around the hand retaining arm and arranged in the support arm, a joint axis coaxially arranged together with the elbow joint axis and used for driving the hand retaining arm to rotate relative to the support arm, a transmission shaft used for transmitting the power for driving the hand to rotate, a first reduction mechanism arranged in the support base and used for reducing the output of the support arm motor, and a second reduction mechanism arranged in the support arm and used for reducing the output of the hand retaining arm motor.

Description

technical field [0001] The present invention relates to a workpiece conveying device suitable for conveying thin plate-shaped workpieces such as glass substrates and wafers in a vacuum environment. Background technique [0002] Such as Figure 11 As shown, in the processing system in which the processing chambers are arranged radially around the transfer chamber, the workpiece transfer device arranged in the transfer chamber for transferring workpieces between the processing chambers can advance the workpiece in the radial direction when viewed from above. It only needs to be moved, so, for example, as disclosed in Patent Document 1, it is possible to use an articulated arm-type transport device in which a parallel linkage mechanism (parallel linkage) is combined. Such a conveyance device can maintain the posture of the hand holding the workpiece with a small power source due to the function of the parallel link mechanism, and can move the workpiece forward in a plan view. ...

AI Technical Summary

Problems solved by technology

As a result, the vertical position of the transport path of the workpiece becomes higher, and the vertical height of the transfer chamber has to be increased, etc., leading to an increase in the size and cost of the processing equipment.

[0006] In addition, since the weight of the front end portion of the arm being rotated increases, in order to cope with the moment load acting on the root portion of the arm and the inertial load for the motor rotating the arm, an increase in motor capacity and a mechanical adjustment of the rotating portion are required. The increase in strength has also led to an increase in the size and cost of the conveying device

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