Thickness measuring device and measuring method of optical distance adjusting ring

Abstract

The invention discloses a thickness measuring device and measuring method of an optical distance adjusting ring. The thickness measuring device comprises a measuring platform (4), wherein a vertically through measuring hole (41) is formed in the measuring platform (4); a platform bracket (3) used for supporting is arranged below the measuring platform (4); an upper length gauge (1) and a lower length gauge (2) are respectively arranged above and below the measuring platform (4); the upper length gauge (1) and the lower length gauge (2) are electrically connected with a length measurement data display instrument (5) used for measuring thickness. According to the thickness measuring device and the measuring method, the two length gauges respectively measure the upper and lower surfaces of the optical distance adjusting ring, the structure warping and deformation parts of the optical distance adjusting ring can be accurately clamped, and measurement of a large-size optical distance adjusting ring can achieved; the thickness measuring device has the advantages of simple structure, reasonable design, accurate measurement, wide application range, and the like.

Description

technical field [0001] The invention relates to the field of measuring mechanical parts, and in particular provides an optical distance adjustment ring thickness measuring device and a measuring method thereof. Background technique [0002] At present, integrated circuit processing technology is developing rapidly, and the lithography resolution is continuously improving from 45nm to 22nm. As the core component of integrated circuit lithography, the lithography projection objective optical system has extremely high requirements for the processing accuracy of mechanical parts. The lithography projection objective optical system is composed of dozens of optical elements, and the axial distance between the optical elements is guaranteed by a high-precision optical distance adjustment ring. This kind of optical distance adjustment ring is a thin plate annular structure, the ratio of diameter to thickness is very large, and it is easy to produce certain warping deformation after ...

AI Technical Summary

Problems solved by technology

[0005] In view of this, the object of the present invention is to provide a device for measuring the thickness of an optical distance adjustment ring and its measurement method, to at least solve the problem of the inability to accurately measure the warping and deformation of the structure of the optical distance adjustment ring and the inability to measure the large-sized optical distance existing in the thickness measuring device. The thickness of the distance adjustment ring has strict requirements on the measurement object and measurement environment, etc.

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