Self-calibration method for thermal deformation of distorting lens under effect of high-power continuous laser irradiation
A technology of laser irradiation and deformable mirror, applied in the field of strong laser technology and adaptive optics
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[0076] The deformable mirror used in this embodiment is a discrete drive type deformable mirror, and its structure is as follows Figure 4 Shown in middle (a); include the film 8 on the surface of the deformable mirror, the mirror surface 9, the pole head 10, the driver 11 and the base 12; its film film structure is: Sub / (HL) 11 H / Air, where Sub means silicon substrate, H means ZnS film, L means YbF 3 thin film, at a central wavelength λ 0 =3.8 μm under normal laser incidence conditions, the film system absorption rate is 109ppm; the diameter of the deformable mirror mirror surface 9 is 180mm, the thickness is 2.5mm, and the material is single crystal silicon; the deformable mirror pole head 10 is a driver 11 The connection unit between the mirror surface 9 is made of monocrystalline silicon, and the diameter of a single pole head is 8 mm, and the length is 10 mm; the driver 11 is the main device for controlling the shape of the deformed mirror surface, and its material is pi...
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