Evaporation crucible and evaporation equipment

Abstract

The invention relates to the technical field of evaporation and discloses an evaporation crucible and evaporation equipment in order to increase the utilization rate of evaporation materials and improve the evaporation efficiency. The evaporation crucible comprises a crucible body and a crucible opening communicated with the crucible body, wherein multiple inert gas introduction nozzles are distributed on the side wall of the crucible opening. The evaporation crucible is applied to the evaporation equipment, inert gas is introduced into the crucible opening through the multiple inert gas introduction nozzles, and inert gas molecules can collide with evaporation gas molecules in the crucible opening, so that kinetic energy for upward movement of the evaporation gas molecules is increased, and the evaporation gas molecules flying to the surface of a substrate and deposited are increased greatly. Compared with the prior art, with the adoption of the scheme, the utilization rate of the evaporation material can be increased, and the evaporation efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of evaporation technology, in particular to an evaporation crucible and evaporation equipment. Background technique [0002] OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode, referred to as OLED) display has thin, light, wide viewing angle, active light emission, continuously adjustable light color, low cost, fast response speed, low energy consumption, low driving voltage, With the advantages of wide operating temperature range, simple production process, high luminous efficiency and flexible display, it has been listed as a promising next-generation display technology. [0003] Forming an OLED device on a substrate usually uses an evaporation process, which refers to heating the evaporation material under a certain vacuum condition, so that the evaporation material is melted (or sublimated) into a vapor composed of atoms, molecules or atomic groups, and then condensed on the surface of the ...

AI Technical Summary

Problems solved by technology

[0004] Evaporation materials are expensive and have a low utilization rate. Due to the long path of evaporating gas molecules escaping from the crucible to the substrate in a high vacuum environment, the proportion of evaporating gas molecules flying to the surface of the substrate and depositing on it is not high. More than 5%, most of the evaporation materials are deposited on the inner wall of the chamber, which will cause pollution to the chamber on the one hand, and affect the vacuum degree of the chamber on the other hand

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