Method for automatically updating SPC strategy and SPC automatic strategy system

Abstract

The invention provides a method for automatically updating a SPC strategy and a SPC automatic strategy system. The method may directly acquire data acquisition specification information from a MES system, automatically adds, deletes, and modifies the SPC strategy on the basis of an original SPC strategy and according to the modification type of the data acquisition specification information so as to fast update the SPC strategy. The method greatly reduces computing, querying and inputting workload and time when an engineer manually updates the SPC strategy, decreases maloperation generated by manual updating, and prevents an error rate caused by manual updating. A subsequent process for detecting the correctness of the modification of the SPC strategy may further reduce the strategy updating error rate and improve strategy reliability and stability.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to an SPC strategy automatic update method and an SPC automatic strategy system. Background technique [0002] In the production of semiconductor devices, the process from a semiconductor single wafer to the final product is an extremely complicated process. There are no less than three to four hundred processes from oxidation diffusion, photolithography, etching, washing, deposition, etc.; especially Now that the demand for various ASICs has soared, most semiconductor companies have shifted from an inventory-oriented production method to an order-oriented production method, making the production mode of the wafer workshop changed from the previous large-scale single-species production to The production mode of multiple varieties in batches greatly increases the complexity of the production process. The manufacturing execution system (manufacturing execution system, refer...

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Problems solved by technology

[0005] 1. There are generally 200 to 300 parameters in a manufacturing process. If hundreds of DCSpecs are modified, it will take about 7 days to complete the update of all SPC strategies

[0006] 2. Manual update will inevitably lead to errors in the input, or calculation errors in the calculation of the upper and lower limits, etc., which will cause errors in the update of the SPC strategy and bring hidden dangers to the process;

[0007] 3. If it is necessary to manually check whether there is an error in the update, it will increase manpower and time.

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