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Reflective microscopic imaging device based on dual-wavelength digital holographic technology

A digital holography and microscopic imaging technology, which is applied in the fields of imaging and optical measurement, can solve the problems of complex algorithms and large amount of calculation, and achieve the effects of reducing complexity, improving phase reconstruction accuracy, and avoiding the phase unwrapping process

Inactive Publication Date: 2015-12-16
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, while these methods unwrap the phase accurately, most of the algorithms are complex and the amount of calculation is large.

Method used

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  • Reflective microscopic imaging device based on dual-wavelength digital holographic technology
  • Reflective microscopic imaging device based on dual-wavelength digital holographic technology
  • Reflective microscopic imaging device based on dual-wavelength digital holographic technology

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Experimental program
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Embodiment Construction

[0010] As shown in Figure 1(a), the reflective microscopic imaging device based on the dual-wavelength digital holography technology of the present invention includes a first laser 1, a second laser 16, a concentrating mirror 2, a concentrating mirror pinhole diaphragm 3, and a concentrating mirror 4 , the first plane mirror 10, the second beam splitter 11, the lens tube lens 12, the microscope objective lens 13, the camera 15, the sixth plane mirror 17, the first attenuation sheet 18 and the second plane mirror 19, the third beam splitter 20, so The condenser pinhole diaphragm 3 described above is placed on the rear focal plane position of the condenser mirror 2, which is also the front focal plane position of the condenser mirror 4; wherein the laser light emitted by the first laser 1 passes through the third beam splitter 20, the condenser mirror 2 converges to the pinhole diaphragm 3 of the condenser mirror, the light diverges through the pinhole diaphragm 3 of the condense...

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Abstract

The invention discloses a reflective microscopic imaging device based on a dual-wavelength digital holographic technology. The reflective microscopic imaging device adopts the dual-wavelength digital holographic technology, irradiates a sample to be tested by means of laser of two different wavelengths simultaneously, acquires two holographic interferograms in two different color channels simultaneously by using a color camera, finds out wrapped phase diagrams at the two wavelengths respectively, and finds out a non-wrapping phase diagram of the sample through carrying out optical unwrapping on the two dual-wavelength wrapped phase diagrams. By adopting the reflective microscopic imaging device for digital holographic microscopic imaging, the complicated phase unwrapping process is avoided, the complexity of later calculation and processing is reduced, and the phase reconstruction precision is increased.

Description

technical field [0001] The invention belongs to optical measurement and imaging technology, in particular to a reflective microscopic imaging device based on dual-wavelength digital holographic technology. Background technique [0002] With the wide application of semiconductor devices, micro-optical components, micro-opto-electromechanical systems and other micro-structural components, a measurement method with high resolution, high precision, non-contact, non-destructive and fast characteristics is needed for in-depth detection, such as objects Three-dimensional topography, surface defects, cracks, surface shape errors, etc. In the measurement of object surface topography, digital holographic microscopy has the advantages of non-contact, non-damage, high resolution and rapid processing, especially with the development of semiconductor and microelectronics technology, the continuous improvement of CCD and CMOS performance, and the computer With the development of technolog...

Claims

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Application Information

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IPC IPC(8): G03H1/04
CPCG01B9/02007G03H1/0443G01B9/02047G01B9/02032G03H2001/005G03H2222/13G03H2001/0456G03H2001/0469G03H1/0866G03H2001/0875G03H2001/266G03H2223/16
Inventor 陈钱孙佳嵩左超冯世杰顾国华张玉珍胡岩张良陶天阳李加基张佳琳孔富城林飞张敏亮范瑶
Owner NANJING UNIV OF SCI & TECH
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