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Positioning fixture and manufacturing process machine

A technology for positioning fixtures and manufacturing processes, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of silicon chip damage, production process yield decline, etc., to avoid damage, improve production process yield, The effect of good production process elasticity

Active Publication Date: 2018-04-24
MACRONIX INT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the case of improper adjustment of the distance between the two parallel scrubbing parts, it is easy to cause damage to the silicon chip and reduce the yield of the manufacturing process.

Method used

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  • Positioning fixture and manufacturing process machine
  • Positioning fixture and manufacturing process machine
  • Positioning fixture and manufacturing process machine

Examples

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Embodiment Construction

[0046] Figure 1A It is a schematic diagram of a manufacturing process machine according to an embodiment of the present invention. Figure 1B Yes Figure 1A Schematic diagram of the production process equipment for chemical mechanical polishing. figure 2 Yes Figure 1A Schematic diagram of the manufacturing process equipment and the positioning jig applied to this manufacturing process equipment, in order to clearly show and explain, figure 2 The adjustment mechanism 140 is omitted. Please refer to Figure 1A , Figure 1B versus figure 2 In this embodiment, the manufacturing process machine 10 includes a manufacturing process equipment 100 and a positioning jig 200, wherein the manufacturing process equipment 100 is, for example, a chemical mechanical polishing equipment applied to a semiconductor manufacturing process, but the present invention is not limited thereto.

[0047] The manufacturing process equipment 100 includes a container 110, a first scrubbing member 120a, and a se...

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Abstract

The invention discloses a positioning jig and a manufacturing process machine. The positioning jig is used to calibrate the distance between two scrubbing pieces arranged side by side. The positioning fixture includes a main body and a positioning block. The main body has a plurality of scale marks and includes an extension. The extension portion has two opposite sides and a width corresponding to the two sides, wherein the width at a position near the tail end of the extension portion is smaller than the width at a position relatively far from the tail end. The positioning block is slidably arranged on the main body and has a supporting surface. The extension is adapted to be inserted between the two scrubbing pieces. When the supporting surface and the two sides of the extension part jointly bear against the two brushing pieces, the positioning block corresponds to one of the scale marks, and the corresponding scale mark indicates the distance between the two brushing pieces.

Description

Technical field [0001] The present invention relates to a positioning jig and a manufacturing process machine, and more particularly to an adjustable positioning jig and a manufacturing process machine using the adjustable positioning jig. Background technique [0002] In the existing semiconductor manufacturing process, as the line width of the manufacturing process is reduced and the density of the device is improved, the planarization technology becomes more important. Among them, chemical mechanical polishing (Chemical Mechanical Planarization, CMP) is one of the most effective technologies that can achieve global planarization in the current semiconductor manufacturing process. Generally speaking, chemical mechanical polishing involves directly contacting the substrate with a rotating polishing pad and applying pressure on the back of the substrate with a load. During polishing, the rotating polishing pad and the operating table rotate while maintaining a downward force on ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/68H01L21/67
Inventor 胡良友叶韦华王育宗谢南河
Owner MACRONIX INT CO LTD
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