A two-dimensional vibration-assisted laser scanning in-position detection system and its detection method

Abstract

The invention discloses a two-dimensional vibration auxiliary laser scanning in-situ detection system which comprises a servo guide rail, an X-axis guide rail and a servo guide rail connecting piece connected with the servo guide rail in a matched manner and further comprises a Y-axis voice coil motor, a laser displacement sensor, an X-axis voice coil motor and an X-axis movement platform. The servo guide rail is parallel to the X-axis guide rail and can slide back and forth along the X-axis guide rail and the servo guide rail connecting piece remains still in the X-axis direction. Due to the arrangement of the servo guide rail, the Y-axis voice coil motor connected with the servo guide rail connecting piece can remain still when the servo guide rail is pulled by the laser displacement sensor to move along the X-axis guide rail, the mass of the Y-axis voice coil motor cannot become the resistance of movement of the laser displacement sensor in the X-axis direction, and the power and the size of the X-axis voice coil motor do not need to be increased. By the adoption of the system, in-situ detection is achieved, the detection efficiency is good while accuracy is guaranteed, the anti-interference performance is good, and the system can be used on different occasions for detection of different targets.

Description

technical field [0001] The invention relates to an in-position detection system and a detection method thereof, in particular to a two-dimensional vibration-assisted laser scanning in-position detection system and a detection method thereof, belonging to the technical field of large-diameter optical mirror geometry measurement. Background technique [0002] With the rapid development of modern military and aerospace and the continuous breakthrough of advanced manufacturing technology, more and more large optical mirrors have been applied, and the precision requirements are getting higher and higher. However, when machining large-diameter optical mirrors on machine tools, in order to improve the machining accuracy, it is necessary to continuously process-test-process. At present, large-diameter optical mirrors are mainly detected by offline equipment. However, due to the large volume and weight of the mirror, it is not easy to move and is expensive. In order to ensure the saf...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problems of in-position detection and at the same time overcome the problems of low detection efficiency, insufficient precision and high price, the object of the present invention is to provide a two-dimensional vibration-assisted laser scanning in-position detection system, including follow-up guide rails and X-axis guide rails, and The follow-up guide rail is matched with the follow-up guide rail connector; the follow-up guide rail is parallel to the X-axis guide rail and can slide back and forth along the X-axis guide rail direction, while the follow-up guide rail connector is in the X-axis direction stay still

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