In-situ detection device and detection method of free-form surface optical element
A technology of optical components and detection devices, which is applied in the field of ultra-precision detection of complex curved surfaces, can solve problems such as indistinguishable, overlapping error forms and processing errors, dynamic tracking errors, etc., and achieve the effect of compact structure, strong versatility, and small volume
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0036] The present invention will be further elaborated below in conjunction with the accompanying drawings and specific embodiments.
[0037] Such as Figures 1 to 8 As shown, an in-position detection device for a free-form surface optical element of the present invention includes a rotating main shaft 2, a Z axis 7, an X axis 8, and a Y-axis module 1 vertically arranged above the Z axis 7, and the rotating main shaft 2 is arranged horizontally Above the X-axis 8 and parallel to the Z-axis 7, the free-form surface optical element 3 is clamped on the rotating spindle 2. The Y-axis module 1 includes a slider 11 and a column 16. The slider 11 is slid on the column 16. The slider 11 is provided with a displacement sensor 5 for in-situ measurement of the free-form surface optical element 3 . The Y-axis module 1 vertically arranged above the Z-axis 7 forms three linear axes with the X-axis 8 and Z-axis 7 to realize spatial movement. The Y-axis module 1 includes a slider 11, a colu...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com