High-purity hydrogen production equipment for crystalline silicon preparation and high-purity hydrogen production process for crystalline silicon preparation

Abstract

The invention discloses high-purity hydrogen production equipment for crystalline silicon preparation and a high-purity hydrogen production process for crystalline silicon preparation. The high-purity hydrogen production equipment comprises a control device, a methanol water storage and conveying device and at least three groups of methanol water reforming hydrogen production modules, wherein the control device is respectively electrically connected with the methanol water storage and conveying device and each group of the methanol water reforming hydrogen production modules to control the working conditions of the methanol water storage and conveying device and each group of the methanol water reforming hydrogen production modules; and hydrogen produced by each group of the methanol water reforming hydrogen production modules is directly conveyed to a crystalline silicon preparation system by virtue of a conveying pipeline, and the control device controls the operation of a proper amount of the methanol water reforming hydrogen production modules according to high-purity hydrogen quantity demand information of the crystalline silicon preparation system. The high-purity hydrogen production equipment disclosed by the invention is high in modularization degree, small in single module size and quick to start, does not need a hydrogen storage tank, can be used for instantly producing hydrogen and rapidly separating hydrogen, is good in stability and high in intelligence, is sensitive in control over parameters in aspects of hydrogen production temperature, gas flow and gas pressure, and is high in safety and high in reliability.

Description

technical field [0001] The invention relates to the technical field of crystalline silicon preparation, in particular to a high-purity hydrogen production equipment and process for crystalline silicon preparation. Background technique [0002] Hydrogen is used in crystal growth and substrate preparation, oxidation process, epitaxy process and chemical vapor deposition (CVD) technology. The semiconductor industry places extremely high demands on gas purity. Pure hydrogen and high-purity hydrogen are common standards for hydrogen used in the electronics industry. The preparation of crystalline silicon requires hydrogen. When silicon is used to generate trichlorosilane SiHCl with hydrogen chloride 3 After that, it is separated by fractional distillation process, and then reduced with hydrogen at high temperature to achieve the purity required by semiconductors. The reaction process is: SiHCl 3 + H 2 → Si + 3HCl. In the epitaxial process, silicon tetrachloride or trichloro...

AI Technical Summary

Problems solved by technology

However, in the existing crystalline silicon preparation process, methanol-water reforming hydrogen production technology uses a single reformer, which is poor in intelligence, unable to be modularized, large in size, slow in start-up, serious waste of methanol raw materials, and low in safety. Hydrogen storage tanks are required, and the stability of crystalline silicon preparation is difficult to guarantee

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