Array substrate structure and manufacturing method thereof

Abstract

The invention provides an array substrate structure and a manufacturing method thereof. An anti-reduction layer (82) is formed on the common electrode (91) after forming the common electrode (91) and before depositing the second insulating layer (83), so as to avoid In the process of directly depositing the second insulating layer (83) on the common electrode (91), the reducing atmosphere generated changes the film quality of the common electrode (91), reducing the need for depositing the second insulating layer on the common electrode (91). The impact on the transmittance of the common electrode (91) when the layer (83) is applied ensures that the common electrode (91) has relatively high transmittance and improves the display effect.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate structure and a manufacturing method thereof. Background technique [0002] The touch screen monitor (Touch Screen) allows the user to operate the host computer as long as the icon or text on the computer display screen is lightly touched with a finger, thus getting rid of the keyboard and mouse operation and making the human-computer interaction more straightforward. It is mainly used for information inquiry in public halls, leadership offices, electronic games, ordering songs and dishes, multimedia teaching, air tickets, train ticket pre-sales, etc. The products are mainly divided into three categories: capacitive touch screen, resistive touch screen and surface acoustic wave touch screen. [0003] The array substrate is an important part of the touch display panel. [0004] see figure 1 , is a schematic cross-sectional view of an existing array s...

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Problems solved by technology

[0011] i.e. the SiH 4 , NH 3 , and N 2 React to form SiN under the action of electromagnetic field generated by RF power (radio frequency power) x :H and H 2 , the H produced by the reaction 2 The atmosphere is reducing, and it is easy to reduce the surface area of ​​the common electrode 910, such as figure 2 As shown, a reduced ITO layer 912 is formed on the surface of the common electrode 910. Below the reduced ITO layer 912 is an ITO layer 914. Due to the poor light transmittance of the reduced ITO layer 912, the overall common electrode 910 The light transmittance is greatly reduced, which in turn reduces the overall light transmittance of the touch display panel, which affects the display effect of the panel (such as brightness, etc.)

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