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Maglev planar motor

A planar motor and maglev technology, which is applied in the direction of electrical components, electromechanical devices, electric components, etc., can solve the problems of limited thrust of planar motors and small flux density of magnetic steel arrays, so as to increase the thrust constant and increase the area ratio of magnetic steel , The effect of the compact structure of the motor mover

Active Publication Date: 2018-07-20
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a maglev planar motor to overcome the problems in the prior art that the magnetic steel array of the maglev planar motor has a small flux density and the thrust of the planar motor is limited

Method used

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  • Maglev planar motor
  • Maglev planar motor
  • Maglev planar motor

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Embodiment Construction

[0033] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0034] like Figure 4 As shown, the magnetic levitation planar motor of the present invention includes: a magnetic steel array 100 (motor stator) and a coil array 200 (motor mover) arranged on the magnetic steel array 100 .

[0035] like Figure 5 As shown, the magnet array 100 includes a square first magnet 101 and four square second magnets 102 arranged around the first magnet 101, the first magnet 101 is an N-type magnetic pole or an S-type magnetic pole, The polarity of the second magnet 102 is op...

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Abstract

The invention discloses a magnetic-levitation planar motor, comprising a magnetic-steel array and a coil array arranged on the magnetic-steel array, wherein the magnetic-steel array includes a first square magnetic-steel and a second square magnetic-steel arranged around the first magnetic-steel, the polarity of the second magnetic-steel is opposite to that of the first magnetic-steel, four sides of the first magnetic-steel and / or the second magnetic-steel are seamlessly connected by third magnetic-steel taking the shape of cubes and provided with chamfers. According to the magnetic-levitation planar motor, the plurality of coils are adopted to form a power generation body, so that the motor rotor structure is more compact and firmer. The structure of the magnetic-steel array is changed, so that the fill-in ratio of the magnetic-steel is improved, and the magnetic density distribution of the motor is improved; furthermore, under the same condition, the thrust constant of the motor is improved for at least 2%.

Description

technical field [0001] The invention relates to the field of integrated circuit manufacturing, in particular to a magnetic levitation planar motor. Background technique [0002] In lithography devices, many occasions require the use of multi-degree-of-freedom drive devices, and the magnetic levitation planar motor can realize six-degree-of-freedom movement. Compared with the traditional "H" or "ten"-shaped planar motor structure, the magnetic levitation planar motor has a simple and compact structure , the overall rigidity is high, and it has the characteristics of direct drive, no mechanical friction and no recoil, which is conducive to achieving higher acceleration performance and positioning accuracy, so it has a very attractive prospect in the field of long-stroke workpiece table operations for lithography machines. [0003] like figure 1 As shown, the existing maglev planar motor includes a magnetic steel array and a coil array. Among them, the magnetic steel array in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K41/03
Inventor 段素丙陈庆生刘小虎池峰季汉川
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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