MOCVD equipment real-time temperature measurement system self-calibration method
A self-calibration and equipment technology, which is applied in the field of self-calibration of MOCVD equipment real-time temperature measurement system, can solve the problems of temperature deviation, epitaxial wafer growth temperature measurement cannot be consistent and accurate, etc.
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[0054] In order to deeply understand the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0055] See attached figure 2 , the MOCVD equipment real-time temperature measurement system self-calibration method provided by the present invention comprises the following steps:
[0056] Step 1: According to the actual heat radiation ratio, in the attached figure 1 The points corresponding to the actual thermal radiation ratio are traced on the theoretical thermal radiation ratio-temperature curve shown;
[0057] Step 2: Substitute the value of temperature T corresponding to the point into
[0058] L ( λ 1 , T ) = m 1...
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