Double-fiber grating probe microscale measurement device and method based on optical fiber ring laser device

Abstract

A double-fiber grating probe microscale measurement device and method based on an optical fiber ring laser device belongs to the technical field of precise instrument manufacture and measurement. The device comprises a pump source, a wavelength division multiplexer, an Er-doped optical fiber, a saturable absorber, a multiway optical switch, an external reference grating, a double-fiber grating probe, a computer and a spectrum analyzer. Through the wavelength division multiplexer, the pump source is connected with a ring cavity composed of the Er-doped optical fiber, a circulator, the saturable absorber, a coupler and an isolator B; the coupler is connected in circuit with the spectrum analyzer and the computer through an isolator A. The method comprises controlling the multiway optical switch through the computer to switch light paths; measuring the laser wavelength output by the optical fiber ring laser device through the spectrum analyzer when the double-fiber grating probe and the external reference grating serve as a laser wavelength selector respectively; through a differential data processing algorithm, achieving non-temperature-coupled two-dimensional microscale measurement. The double-fiber grating probe microscale measurement device and method based on the optical fiber ring laser device has the advantages of integrating sensing and energy supply into a whole and being compact in system and high in sensitivity.

Description

technical field [0001] The invention belongs to the technical field of precision instrument manufacturing and measurement, and in particular relates to a micro-scale measurement device and method of a double fiber grating probe based on a fiber ring laser. Background technique [0002] With the continuous development of the aerospace industry, automobile industry, electronics industry and cutting-edge industries, the demand for precision and tiny components has increased dramatically. Due to the limitations of the space scale and the shadowing effect of the micro-components to be measured, as well as the influence of the measurement contact force, it is difficult to realize the precise measurement of the micro-component scale, especially the measurement of the depth of the micro-cavity components is difficult to increase, which has become a constraint to the development of the industry. "bottleneck". In order to achieve smaller size measurement and increase the measurement ...

AI Technical Summary

Problems solved by technology

[0009] 1. It is difficult to further improve the touch displacement resolution of the detection system

The primary magnification of the existing detection system is low, resulting in a low overall magnification, and it is difficult to further improve the resolution of the touch displacement.

The fiber grating probe based on FBG Bending's micropore size measurement method cannot apply the main micro-touch displacement effect to the fiber grating, and the sensing signal converted into spectral information is weak, and the resolution of the system is very low

[0010] 2. The real-time performance of the detection system is poor, and it is difficult to achieve precise online measurement

The probe of the micropore size measurement method based on FBG Bending has the same performance in all directions, and there is coupling in the radial two-dimensional touch displacement sensing, and it cannot be separated, resulting in a large error in the two-dimensional measurement, and the radial two-dimensional measurement cannot be realized. Accurate measurement of dimensional contact displacement

[0012] 4. Does not have the decoupling capability of radial and axial detection

The detection methods mentioned above either do not have the ability of axial detection or the decoupling ability of radial and axial detection. When performing micro-scale measurement, the measurement steps are complicated and the measurement efficiency is low.

Images