Integrated air passage system
A gas system and integrated technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of complex gas circuit structure, poor air tightness, large internal volume, etc., to achieve good air tightness, small internal volume, compact effect
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[0009] The present invention will be further described below in conjunction with drawings and embodiments.
[0010] figure 1 Among them, a number of air intake passages 2 and air outlet passages 4 are arranged in the metal block 7 . A sensor 6 is arranged under the metal block 7 , and an air chamber 3 is formed between the metal block 7 and the sensor 6 . The gas enters the air chamber 3 through the air inlet passage 2, reaches the sensor sensing surface 5 of the sensor 6, and is discharged from the air outlet passage 4, the sensor 6 is connected with the signal processing device 8, and the air inlet passage 2 is connected with the air inlet device 9, And a valve I is provided at the air inlet, the air outlet channel 4 is connected with the air receiving device 8, and a valve II is arranged at the air outlet.
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