A kind of acid etching quartz pendulum flexible beam equipment

Abstract

The invention relates to the field of manufacture of quartz pendulous reed flexible beams, and especially relates to acid etching equipment for a quartz pendulous reed flexible beam. The acid etching equipment for the quartz pendulous reed flexible beam is used for acid etching of the quartz pendulous reed flexible beam. The equipment comprises a work plane and a work cover arranged on the work plane, and the work plane and the work cover form a work space; the work plane is provided with a first acid etching groove, a second acid etching groove, a cleaning groove, a thickness measuring device, a clamping structure and a movement member; the clamp structure is used to clamp the quartz pendulous reed flexible beam; the movement member is used to drive the clamp structure to move among the first acid etching groove, the second acid etching groove and the cleaning groove; the first acid etching groove is used to hold a first hydrofluoric acid solution, and the second acid etching groove is used to hold a second hydrofluoric acid solution; and the thickness measuring device is used to measure the thickness of the quartz pendulous reed flexible beam. The acid etching equipment of the quartz pendulous reed flexible beam is capable of reducing volatilization of hydrofluoric acid and avoiding environmental pollution.

Description

technical field [0001] The invention relates to the field of flexible beam manufacturing of quartz pendulum plate flexible beams, in particular to an acid-etched quartz pendulum plate flexible beam equipment. Background technique [0002] Hydrofluoric acid is a highly volatile corrosive liquid that can strongly corrode metals, glass, and silicon-containing objects; it also has a strong pungent odor and is toxic, such as inhalation of vapor or contact with skin can cause irreversible burns. [0003] However, in the process of acid etching the flexible beam of the quartz swing plate, a large amount of hydrofluoric acid solution is needed, and the acid etching process takes a long time, so a large amount of hydrofluoric acid will be volatilized; and in the prior art, there is no It is an equipment for continuously working on the acid etching of the quartz pendulum flexible beam. Therefore, it is difficult to avoid the injury to the operator during the acid etching process of th...

AI Technical Summary

Problems solved by technology

[0003] However, in the process of acid etching the flexible beam of the quartz swing plate, a large amount of hydrofluoric acid solution is needed, and the acid etching process takes a long time, so a large amount of hydrofluoric acid will be volatilized; and in the prior art, there is no Equipment for continuous work on the acid etching of quartz pendulum flexible beams, therefore, it is difficult to avoid injury to the operator during the acid etching process of quartz pendulum flexible beams

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