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Preparation process of magnetic sensation device

A preparation process and magnetic sensing technology, which is applied in the direction of measuring devices, measuring magnetic variables, instruments, etc., can solve the problems of difficult magnetic signal output and the inability to realize the manufacture of three-axis sensors at the same time, and achieve the effect of strong sensitivity

Inactive Publication Date: 2015-03-18
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the simultaneous fabrication of three-axis sensors cannot be realized on a single wafer / chip
[0009] In addition, it is very difficult for the usual Z-axis magnetic sensor to realize the self-detection of the Z-axis direction. How to realize the real magnetic signal output of the Z-axis direction is a difficult problem.

Method used

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  • Preparation process of magnetic sensation device
  • Preparation process of magnetic sensation device
  • Preparation process of magnetic sensation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0061] see Figure 6 , the present invention discloses a magnetic sensing device, which includes a magnetic sensing component in a third direction (such as a Z axis) to sense a magnetic field signal in a third direction; the magnetic sensing component in a third direction includes a substrate 1 , the surface of the substrate is provided with a groove 2, the length of the groove 2 is more than five times the width.

[0062] The groove 2 is provided with a magnetic conduction unit 3, the main part of the magnetic conduction unit is arranged in the groove 2, and a part is exposed from the groove 2 to the surface of the substrate 1 to collect the magnetic field signal in the third direction, and the The magnetic signal is output to the sensing unit for measurement.

[0063] The induction unit (including the magnetic material layer 4 and the metal electrode layer 5) is arranged on the surface of the substrate 1, the induction unit can directly measure the magnetic field in the fir...

Embodiment 2

[0076] see Figure 8 , Figure 9 , in this embodiment, no insulating material layer may be provided above the magnetic conduction unit and the induction unit.

[0077] A comb-tooth-shaped electrode array is arranged above the magnetic material of the induction unit. The existing arrangement is: a pair of comb-tooth-shaped electrodes corresponds to a magnetic conduction unit (a groove); Among them, one magnetic conduction unit (groove) corresponds to more than two pairs of comb-shaped electrodes, that is, one magnetic conduction unit can output magnetic signals for more than two groups of induction units, thereby realizing the detection of Z-axis magnetic signals. The structure has better sensitivity. The gap between the induction unit and the magnetic conduction unit is between 10 nanometers and 1 micrometer, such as 100 nanometers, 200 nanometers, and 300 nanometers.

[0078] Figure 8 Shown is a top view of the Z-axis sensor, the groove is long, and a long magnetic condu...

Embodiment 3

[0080] The difference between this embodiment and the above embodiments is that in this embodiment, the Z-axis sensor can also be as follows Figure 10 and Figure 11 structure shown.

[0081] Figure 10 Among them, a long groove is provided with a plurality of magnetic conduction units, and each magnetic conduction unit corresponds to a plurality of induction units.

[0082] Figure 11 Among them, one magnetic conduction unit is arranged in one groove, multiple grooves are arranged in a straight line, and each magnetic conduction unit corresponds to a plurality of induction units.

[0083] In summary, the magnetic sensing device and its manufacturing process proposed by the present invention provide electric signals to the comb-shaped electrodes of more than two pairs of sensing units through one magnetic permeation unit, and the obtained device has stronger sensitivity. In addition, the present invention retains the metal layer in the groove while manufacturing the pair ...

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Abstract

The invention discloses a preparation process of a magnetic sensation device. The device comprises a third direction magnetic sensation component, wherein the third direction magnetic sensation component comprises a substrate, a magnetic conductive unit and sensing units; a ditch is formed in the surface of the substrate; the main body part of the magnetic conductive unit is arranged in the ditch and is used for collecting a magnetic field signal in a third direction and outputting the magnetic field signal to the sensing units for measuring; each sensing unit is arranged on the surface of the substrate and is used for receiving a magnetic signal in the third direction output by the magnetic conductive unit and measuring magnetic field intensity and magnetic field direction corresponding to the third direction according to the magnetic signal; each sensing unit comprises a magnetic material layer and a metal electrode layer on the magnetic material layer; each sensing unit comprises two adjacent comb tooth-shaped electrodes; a magnetic conductive unit in one ditch is matched with the plurality of sensing units. Magnetic signals are provided to the comb tooth-shaped electrodes of over two sensing units through one magnetic conductive unit, and an obtained device has higher sensibility.

Description

technical field [0001] The invention belongs to the technical field of semiconductor technology, and relates to a sensing device, in particular to a magnetic sensing device; at the same time, the invention also relates to a preparation process of the magnetic sensing device. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in recent years, in addition to navigation systems, more and more smart phones and tablet computers have also begun to be equipped with electronic compass as standard, bringing users In recent y...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/09
Inventor 张挺万虹王宇翔杨鹤俊邱鹏
Owner QST CORP
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