Silicon material heat source structure and manufacturing method thereof

Abstract

The invention discloses a silicon material heat source structure and a manufacturing method thereof. The manufacturing method comprises the steps of firstly, fabricating a heating element by use of photoetching and lift-off processes, secondly, forming a cantilever beam structure heating element by etching a corresponding cantilever beam structure, and finally, forming a supporting cavity on which a high-thermal resistance reflecting film is attached on a silicon structure. The silicon material heat source structure is formed by bonding the cantilever beam structure heating element to the surface-treated supporting cavity on which the high-thermal resistance reflecting film is attached, and is of a micron dimension; according to the manufacturing method, a thermal island is formed by use of a suspension method, and meanwhile, a surrounding thermal reflecting cavity on which the high-thermal resistance reflecting film is attached is formed under the thermal island to guarantee the directionality of heat radiation, and consequently, a unidirectional radiation heat source can be manufactured and is high in heat conduction efficiency; the manufacturing method is applicable to the micro-electro-mechanical field and also to traditional heater manufacturing to realize higher accuracy.

Description

Technical field: [0001] The invention relates to the field of micro-electromechanical machining, in particular to a silicon material heat source structure and a manufacturing method thereof. Background technique: [0002] The current popular micro-heater adopts MEMS micro-machining technology to make micro-heating coils on the micro-structure of silicon polymer materials, and provide working temperature by electrothermal method. This technology is widely used in miniature radiant heaters and metal-semiconductor gas sensors that need to provide a certain operating temperature. However, its usual heating range is generally within a few square millimeters, the heating lacks directivity, and the heat radiation range is not concentrated. Therefore, the micro-heaters made by conventional methods have the problems of non-uniform heating, insufficient thermal directivity, and low efficiency. This problem also exists in the field of macro heating. For example, the electric heating ...

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Problems solved by technology

However, its usual heating range is unobstructed within a few square millimeters, the heating lacks directivity, and the heat radiation range is not concentrated.

Therefore, the micro-heaters made by conventional methods have the problems of uneven heating, insufficient heat directivity, and low efficiency.

This problem also exists in the field of macroscopic heating. For example, the electric heating plate of the electric ceramic furnace is generally made of heating tape coiled on the chassis, which has many advantages, but there are still problems of low heat generation density and insufficient concentration of heat transmission direction.

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