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B-cemented semiconductor-heating temperature and humidity self-compensation integrated gas sensor

A gas sensor, integrated sensor technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of working temperature changing with the environment, single gas parameters, large volume, etc., to achieve easy control of heating speed, high energy utilization, Highly integrated effect

Inactive Publication Date: 2015-02-25
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the problems that the existing gas sensor detects single gas parameters, is greatly affected by ambient temperature and humidity, the working temperature changes with the environment, has low precision, large volume, and high cost. Humidity self-compensating gas integrated sensor

Method used

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  • B-cemented semiconductor-heating temperature and humidity self-compensation integrated gas sensor

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specific Embodiment approach 1

[0021] Specific implementation mode 1: The pad (4) of the semiconductor heating body in this sensor is composed of four parts (4-1), (4-2), (4-3), and (4-4). The semiconductor heating electrode (6) Composed of four parts (6-1), (6-2), (6-3), and (6-4), the pad of the semiconductor heating body (4-1) and the semiconductor heating electrode (6- 1) connected, (4-2) connected with (6-2), (4-3) connected with (6-3), (4-4) connected with (6-4), semiconductor heating electrode (6) connected with The permeable B semiconductor heating body (3) is connected, and the gas sensor unit pad (5) is composed of (5-1), (5-2), (5-3), (5-4), (5-5), ( 5-6), (5-7), (5-8), (5-9), (5-10), (5-11), (5-12), (5-13), (5- 14), (5-15) and (5-16) sixteen sensor unit pads, the gas sensor unit (8) consists of (8-1), (8-2), (8-3), (8 -4), (8-5), (8-6), (8-7), (8-8) are composed of eight gas sensor units, and the ambient temperature and humidity sensor (9) is composed of the ambient humidity sensor unit (9-1 ...

specific Embodiment approach 2

[0022] Specific implementation mode two: combination figure 2 and Figure 4 To describe this embodiment, starting from the top view surface of the sensor, use hydrochloric acid, hydrofluoric acid, and EPW etchant in sequence to etch away unnecessary alumina, silicon dioxide, and silicon to form a cantilever beam structure.

specific Embodiment approach 3

[0023] Specific implementation mode three: combination figure 2 and image 3 Describe this embodiment, the B-infiltrated semiconductor heating body (3), the B-infiltrated semiconductor heating body pad (4), the gas sensor unit pad (5), the semiconductor heating electrode (6), and the aluminum oxide insulating layer (7) of the sensor ), the gas sensor unit (8), the heating body temperature sensor unit (10) and the groove (12) all have a symmetrical structure.

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Abstract

A B-cemented semiconductor heating and temperature and humidity self-compensation integrated gas sensor is applicable to the field of measurement of multiple gases. The invention aims to solve the problems such that the existing gas sensor has single detection parameter and is severely affected by ambient temperature and humidity, operating temperature of the sensor changes with the environment, and the sensor is low in precision, large in size and high in cost. The B-cemented semiconductor heating and temperature and humidity self-compensation integrated gas sensor is characterized by mainly comprising a silicon substrate, a silicon dioxide insulating layer, a B-cemented semiconductor heater, an aluminum oxide insulating layer, a nickel-chrome membrane sensor, connecting wires and slots. According to the B-cemented semiconductor heating and temperature and humidity self-compensation integrated gas sensor, the internal B-cemented semiconductor heater provides moderate operating temperature for the sensor, thus increasing precision; the cantilever structure helps greatly decrease waste of heat; by the application of the MEMS (micro-electromechanical systems) technology, integration of multiple sensors is achieved, the size of the sensor is reduced, and the cost thereof is reduced.

Description

technical field [0001] The invention relates to the field of gas sensors and their structures. Background technique [0002] In the production and life of modern society, no matter it is polluting gas or beneficial gas, people cannot do without or avoid it. With the continuous development of industrialization, there are more and more types of gas, some are poisonous and harmful, and some are flammable and flammable. Explosion, so the detection of gas has become a top priority topic. Existing gas sensors are generally cross-sensitive, and their responses are affected by factors such as temperature, humidity, and environmental conditions. The gas integrated sensor integrates N gas sensing units with different selectivity on a small substrate, and can detect M (M≤N) different single or mixed gases at the same time. A temperature and humidity self-compensating gas integrated sensor heated by nickel-chromium alloy film invented in this paper can not only realize the measurement...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00G01D21/02
Inventor 施云波兰云萍冯侨华赵文杰王欣
Owner HARBIN UNIV OF SCI & TECH
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