Polysilicon fuse monitoring structure and monitoring method

Abstract

The invention discloses a polysilicon fuse monitoring structure. The polysilicon fuse monitoring structure comprises a polysilicon fuse with specific length and width and two leading-out ends connected with two ends of the polysilicon fuse, wherein a loop of incomplete chain type ring belt surrounds the polysilicon fuse and the leading-out ends at a certain distance, and two ends of the ring belt are another two leading-out ends. The invention further discloses a monitoring method for the polysilicon fuse monitoring structure. Through the method and the structure, the distance between the chain type ring belt and the polysilicon fuse can be adjusted, so resistance value change of the incomplete chain type ring belt before and after fusing of the polysilicon fuse can be effectively monitored, and a safety distance from the polysilicon fuse to a peripheral circuit of the polysilicon fuse can be acquired.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to a polysilicon fuse monitoring structure and monitoring method. Background technique [0002] The fuse structure is widely used in the field of integrated circuits and is an important part of the integrated circuit. Generally used for circuit, data protection, etc., the polysilicon fuse that is blown by high current is a relatively common fuse structure. The fusing of polysilicon fuses often affects the surrounding circuits when polysilicon fuses are blown. The traditional structure of monitoring the fusing status of polysilicon fuses only has a separate structure of polysilicon fuses, such as figure 1 As shown, the structure is composed of a polysilicon fuse 101 and a first lead-out region 102 and a second lead-out region 103 on both sides of the polysilicon. 104 connects each layer of metal. When fusing the polysilicon fuse, the fusing condition o...

AI Technical Summary

Problems solved by technology

Because polysilicon will burst when it is fused, it will affect the surrounding devices or circuits, making the devices or circuits unable to work normally

The traditional monitoring structure cannot monitor whether the surrounding devices or circuits are affected after the polysilicon fuse is blown and burst, nor can it be concluded that how far away from other devices or circuits is the safe distance from the polysilicon fuse

[0004] Therefore, the traditional polysilicon fuse monitoring structure cannot effectively and comprehensively monitor polysilicon fuses, nor can it provide customers with a design criterion

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