Two-dimensional scanning micromirror of electrostatic drive microelectromechanical system

Abstract

The invention discloses a two-dimensional scanning micromirror of an electrostatic drive microelectromechanical system. The two-dimensional scanning micromirror mainly comprises a low-resistance silicon substrate located on the bottommost layer, fixed comb teeth, comb tooth leads, movable comb teeth, a two-dimensional scanning micromirror set, supporting beam sets and anchor positions, wherein the fixed comb teeth and the comb tooth leads are located on the middle layer, the movable comb teeth, the two-dimensional scanning micromirror set and the supporting beam sets are located on the topmost layer, and the anchor positions are located on both the middle layer and the topmost layer. Four L-shaped supporting beams are introduced in the X-axis direction as the mirror plane rotating shaft in the X-axis direction, so that the leads of the internal fixed comb teeth just pass through the center of the gap between every two adjacent L-shaped supporting beams. Due to the design, the device structure and the machining technology can be simplified, cost is reduced, the leads of the micromirror can be led more conveniently, and thus a large-scale micromirror array can be formed conveniently. The two-dimensional scanning micromirror is of vital significance in expanding the application fields of two-dimensional scanning micromirrors of electrostatic drive microelectromechanical systems.

Description

technical field [0001] The invention relates to the field of micro-opto-electro-mechanical systems, in particular to an electrostatically driven micro-electro-mechanical system two-dimensional scanning micromirror. Background technique [0002] In the field of micro-opto-electro-mechanical systems, electrostatically driven two-dimensional scanning micro-electro-mechanical system micro-lenses are important devices in modern optical communication systems, and can be used as optical switches, optical attenuators, and optical multiplexers. However, the existing electrostatically driven MEMS two-dimensional scanning micromirrors and their arrays mainly have the following disadvantages: (1) mirror bending caused by residual stress will be aggravated by temperature changes, resulting in increased insertion loss; (2) The device structure and processing technology are complicated, and the processing cost is high; (3) the leads are inconvenient when forming an array. These shortcomin...

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Problems solved by technology

[0003] The technical problem to be solved by the present invention is that the existing static-driven MEMS two-dimensional scanning micromirror has a large insertion loss, complex process, and difficult wiring when forming a large-scale micromirror array. It provides an electrostatically driven MEMS two-dimensional scanning Micromirror and its manufacturing process

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