Manufacturing method of mask plate opening for organic light-emitting display device

Abstract

The invention discloses a manufacturing method of a mask plate opening for an organic light-emitting display device, which comprises the step of forming the opening by a laser. In the opening forming step, a laser head emits a laser beam of which the direction forms an acute angle with the plane of the mask base plate, and the laser beam emitted by the laser head operates on the mask base plate along the preset trajectory and forms the opening on the mask base plate, thereby forming the mask plate; and the area S1 formed by the edge of the opening on the mask base plate adjacent to the side of the laser head is smaller than the area S2 formed by the edge of the side far from the laser head. The technique can avoid the problem of environmental damage caused by the mask plate opening manufactured by the traditional chemical etching, can ensure the opening (small opening) edge (the area formed by the edge is S1) of the mask plate adjacent to the side of the deposited base plate to have favorable linearity, and can well satisfy the vapor deposition application of the organic light-emitting display device organic material.

Description

[0001] technical field [0002] The invention relates to a method for manufacturing a mask plate, in particular to a method for manufacturing an opening of a mask plate for an organic light-emitting display. [0003] Background technique [0004] Compared with the current LCD technology, the display made of OLED technology not only has full color, fast response time, high brightness (100~14,000cd / m2), high lumen efficiency (16~ 38lm / W), viewing angle of more than 170 degrees, no general LCD afterimage, can be made into large-sized and flexible panels, and can work in the range of -30 degrees Celsius to 80 degrees Celsius, etc., and the manufacturing process is simple, the overall The thickness can also be reduced to less than 1mm, and the cost is only 30-40% of TFT-LCD. Therefore, the displays made by using the OLED technology are very popular in the society. [0005] In the manufacturing process of organic light-emitting displays, the deposition of organic layers will us...

AI Technical Summary

Problems solved by technology

However, when this method is actually used to prepare a mask, due to the fact that the thickness of the plate used to make the mask is not absolutely consistent, and the characteristics of the laser, the opening of the mask will have the following defects: the opening of the mask is formed on the side close to the laser head 51 The straightness of the opening edge of the large opening is relatively good, while the straightness of the opening edge of the small opening formed on the side away from the laser head 51 is relatively poor

And in the evaporation process, the small opening surface formed by the mask away from the laser head 51 needs to be close to the evaporation deposition substrate 14, that is, the small opening surface of the mask determines the shape and structure of the organic deposition layer, so the straightness of the opening edge is not good The small opening surface will indirectly affect the edge quality of the organic deposition layer

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