Device for generating low-temperature plasma through single electrode

Abstract

The invention discloses a device for generating low-temperature plasma through a single electrode. The device comprises a high-frequency power source module, a matching module, a high-frequency boosting module, a line electrode and paired metal ball electrodes. The high-frequency power source module is connected with the high-frequency boosting module through the matching module, and the high-frequency boosting module is further connected with one metal ball electrode which is connected with the other metal ball electrode through the line electrode. High-frequency signals generated by the high-frequency power source module stimulate the high-frequency boosting module through the matching module to generate high voltage which is applied to the line electrode between paired metal balls, destructive discharge is conducted on the air on the periphery of the line electrode, and the linear low-temperature plasma is generated. By means of the device for generating the low-temperature plasma through the single electrode, the wide low-temperature plasma can be generated through one linear electrode at normal voltage, low-temperature plasma processing only needs to be conducted on one face of a material, the limitation on the distance between the two electrodes of the DBD low-temperature plasma is effectively relieved, and the defect that thick high polymer materials or hollow materials cannot be processed is overcome.

Description

technical field [0001] The invention discloses a device for generating low-temperature plasma with a single electrode, which belongs to the technical fields of low-temperature plasma material processing and industrial waste gas processing and environmental protection. Background technique [0002] There are a large number of active particles in low-temperature plasma, which are more active than those produced by ordinary chemical reactors, and are more likely to react with the surface of materials and various gases in contact with them. Therefore, it has extremely broad application prospects in the fields of materials and environmental protection, such as surface modification of materials, air purification, and air pollution treatment. [0003] In the prior art, the dielectric barrier discharge DBD technology is a form of gas discharge. By introducing a barrier medium between the electrodes, the free growth of the discharge current can be limited when the discharge occurs, a...

AI Technical Summary

Problems solved by technology

However, there is an insurmountable problem, that is, the ordinary parallel plate atmospheric pressure dielectric barrier discharge is limited to the narrow area between the two plates, so it cannot handle materials with complex structures or thicker materials or hollow materials. There are certain limitations in its industrial application range

Although the low-temperature plasma spray gun can process materials with complex structures or thicker materials or hollow materials, the processing range of low-temperature plasma generated by the spray gun is generally relatively small, only a few millimeters to tens of millimeters, and it is necessary to deal with complex structures with a wide width. For thicker materials or thicker materials or hollow materials, multiple groups of spray guns are required to be used in combination, which is expensive and has mutual interference problems of electromagnetic compatibility.

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