Electromagnetic balance type acceleration sensor
An acceleration sensor, balanced technology, applied in the direction of using inertial force for acceleration measurement, etc., can solve the problems such as the support body is easily affected by resistance, the flexible pendulum acceleration sensor has poor impact resistance, and achieves no inter-axis interference, zero The effect of high bit stability and high impact resistance
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[0017] The work of the present invention will be described in detail below with reference to the accompanying drawings.
[0018] Such as figure 1 Shown is the top view of the electromagnetic balanced acceleration sensor of the present invention. The electromagnetic balance acceleration sensor includes: a torque device stator (12) composed of a permanent magnet group (121, 122), a coil slot (111), a mover coil (112), a wiring board (113), a foil wire (114) and a displacement metal A torque device mover (11) composed of a sheet (21), a torque device stator (12) and a torque device mover (11) constitute a torque device system (10). A signal sensing system (20) composed of a displacement metal sheet (21), a sensing coil (22) and a sinusoidal excitation signal generating circuit (23), a servo amplifier system (30), and an external support structure (40). The permanent magnet group (121, 122) is directly fixed on the external support structure (40) through the magnet fixing frame, and...
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