Nitrogen oxide sensor
A technology of nitrogen oxides and sensors, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of many lead-out lines and affect the measurement accuracy, and achieve the effect of structure optimization and signal accuracy improvement
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[0019] The present invention will now be described in further detail with reference to the drawings. These drawings are all simplified schematic diagrams, which merely illustrate the basic structure of the present invention in a schematic manner, so they only show the structures related to the present invention.
[0020] Such as figure 1 As shown, a nitrogen oxide sensor of the present invention is composed of seven layers of rectangular substrates. The first layer of substrate 10 to the third layer of substrate 30 from top to bottom form a gas inlet 21, a first chamber 22 and The second chamber 23, the first chamber 22 is provided with an oxygen pump 80, the second chamber 23 is provided with an oxygen measuring pump 90, and a diffusion barrier 24 is provided between the first chamber 22 and the second chamber 23 .
[0021] The electrode of the oxygen pump 80 is composed of a first electrode 81 and a second electrode 82 arranged on the upper and lower surfaces of the first layer ...
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