Temperature sensor
A technology of temperature sensors and heat transfer devices, applied in thermometers, instruments, scientific instruments, etc., can solve the problems of low sensitivity of temperature sensors and large measurement errors, and achieve the effects of easy promotion, accuracy and simple structure
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[0015] A temperature sensor, including a mounting base 1, a silicon base 2 and a silicon cup 3, the top of the mounting base 1 is connected to the silicon base 2, the top edge of the silicon base 2 is connected to the silicon cup 3, the top of the silicon cup 3 is connected to the silicon film 5, and the silicon film 5 A piezoresistive bridge 6 is arranged on the top, and an expansion chamber 4 is provided between the silicon seat 2 and the silicon cup 3. The expansion chamber 4 is equipped with an expansion fluid 7, and the expansion chamber 4 is equipped with a T-shaped heat transfer device 8 inside. The heater 8 passes through the silicon seat 2 and the mounting seat 1, the expansion liquid 7 is a concentrated ammonia solution, the material of the T-shaped heat transfer device 8 is stainless steel, the structure is simple, no PN junction is used, and external signals are prevented from interfering with the measurement, and the measurement sensitivity is relatively high. High...
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