Multi-path liquid temperature regulating device and temperature control method

Abstract

The invention discloses a multi-path liquid temperature regulating device and a temperature control method thereof and belongs to a liquid temperature regulating device and a temperature control method thereof. The multi-path liquid temperature regulating device can solve the problem that the immersion solution temperature regulating device of the existing mask aligner only has the control ability of one-path output temperature and cannot coordinate to adjust the far-end and near-end water supply temperature. The temperature regulating device comprises a pure water supply part, a liquid injection part and a control system, the pure water supply part is respectively arranged in the far-end pure water device, and the liquid injection part is arranged in the mask aligner; the pure water supply part and the liquid injection part are connected through far transmission pipelines; the control system respectively collects the temperature values of a pure water temperature sensor, a water supply temperature sensor and first-third temperature sensors; heating voltage of first-third heaters and driving current of a cooling water flow servo valve are controlled. In the regulating device, a heat exchanger and a low-power heater are combined, flow is regulated through the flow servo valve and power of multiple low-power heaters is also regulated, such that pure water temperature on multiple output ends reaches the steady value of +1 / -1 degree centigrade.

Description

technical field [0001] The invention belongs to a liquid temperature regulating device and a temperature control method thereof, in particular to a multi-channel liquid temperature regulating device and a temperature control method thereof, which uses a heat exchanger and a low-power heater to adjust the flow through a flow servo valve and adjust multiple The power of a low-power heater makes the temperature of pure water at multiple output ends reach a steady-state accuracy of ±0.01°C. Background technique [0002] The space between the last projection objective lens and the silicon wafer of the immersion lithography machine is filled with immersion liquid. According to the Rayleigh criterion, the resolution of the lithography machine Among them, NA is the numerical aperture of the projection objective lens, λ is the wavelength of the light source, k 1 is a constant factor, the temperature change of the immersion liquid will directly cause the change of the liquid refract...

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Problems solved by technology

[0006] The present invention provides a multi-channel liquid temperature adjustment device, and provides its temperature control method at the same time, solving the problem that the existing photolithography machine immersion liquid temperature adjustment control device only has the temperature control capability of one output, and cannot meet the multi-channel liquid injection requirements of the immersion unit problems, and the problem that the remote and near-end water supply temperature adjustments cannot be coordinated

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