Control system and control method of robot
A control system and robotic arm technology, applied in manipulators, program-controlled manipulators, manufacturing tools, etc., can solve problems such as increased equipment cost and robotic arm blocking, and achieve the effect of solving robotic arm blocking and simple logic control.
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[0032] The present invention will be further described below with reference to the drawings and specific embodiments, but it is not a limitation of the present invention.
[0033] Such as figure 1 As shown, an embodiment of a robotic arm control system of the present invention is applied to a semiconductor manufacturing equipment controlled by an on-line equipment controller and provided with at least two processing cavities, which includes a control logic generating device, a controller, and a To load and unload the processing substrate mechanical device into the processing cavity, the control logic generating device is connected with the controller, and the controller is provided with instructions for controlling the mechanical device, and the controller is connected with the mechanical device to control the action of the mechanical device;
[0034] The control logic generating device includes a first data storage component and a monitoring component. The first data storage compo...
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