Sheet-type structure oxygen sensor and manufacturing method thereof
The technology of an oxygen sensor and its manufacturing method, which is applied in the field of oxygen sensors, can solve problems such as product appearance bending and product structure asymmetry, and achieve the effects of beautiful appearance, reduced macro cracks, and reasonable structural design
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[0033] see figure 1 As shown, a chip structure oxygen sensor of the present invention includes a heating body 1, a zirconia solid electrolyte 2, and a supporting structure 3 with insulating characteristics between the heating body 1 and the zirconia solid electrolyte 2; The zirconium solid electrolyte 2, the supporting structure 3 and the heating body 1 are sequentially arranged from top to bottom, and a zirconia symmetrical layer 4 is also arranged between the supporting structure 3 and the heating body 1, and the zirconia symmetrical layer 4 is connected with the heating body 1 The zirconia solid electrolyte 2 is distributed symmetrically with respect to the supporting structure 3; during the sintering process, the sintering stress of the zirconia symmetrical layer 4 and the zirconia solid electrolyte 2 layers is balanced and offset, which can reduce the sintering stress.
[0034] The heating body 1 includes an alumina carrier 11 and a platinum electrode heating circuit 12 a...
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