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Optical filter device, optical module and electronic apparatus

An optical filter, interference filter technology, applied in optics, measuring devices, optical components, etc., can solve the problems affecting the optical characteristics of the wave and interference filter, the tilt of the interference filter or the deflection on the substrate, etc.

Inactive Publication Date: 2014-10-01
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the case where such electrodes are provided, there is a problem that the interference filter is tilted or the substrate is warped due to the pressing force when wiring the electrodes, which affects the optical characteristics of the interference filter.

Method used

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  • Optical filter device, optical module and electronic apparatus
  • Optical filter device, optical module and electronic apparatus
  • Optical filter device, optical module and electronic apparatus

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0048] Hereinafter, a first embodiment according to the present invention will be described based on the drawings.

[0049] [Configuration of Optical Filter Device]

[0050] figure 1 It is a perspective view showing a schematic configuration of the optical filter device 600 according to the first embodiment of the present invention. figure 2 is a cross-sectional view showing the optical filter device 600 .

[0051] The optical filter device 600 is a device that extracts light of a predetermined target wavelength from incident light to be inspected and emits it. The optical filter device 600 includes a housing 601 and a variable wavelength interference filter 5 housed in the housing 601. (refer to figure 2 and image 3 ). Such an optical filter device 600 can be incorporated into, for example, an optical module such as a colorimetric sensor, an electronic device such as a colorimetric device, or a gas analysis device. In addition, configurations of an optical module and...

no. 2 approach

[0160] Next, a second embodiment according to the present invention will be described based on the drawings.

[0161] In this embodiment, the difference from the above-mentioned first embodiment is that the fixing members are arranged at positions overlapping with the respective electrode pads 541P, 551P, 563P, and 564P in a plan view of the filter.

[0162] Figure 7 It is a schematic diagram showing the positional relationship between the electrode pads 541P, 551P, 563P, and 564P and the fixing member 7A in plan view of the filter in the optical filter device according to the second embodiment of the present invention. In addition, it basically has the same structure as 1st Embodiment except the said difference. In the following description of the embodiments, the same reference numerals are assigned to the configurations that have already been described, and the description thereof will be omitted or simplified.

[0163] Such as Figure 7 As shown, in a plan view of the ...

no. 3 approach

[0170] Next, a third embodiment according to the present invention will be described based on the drawings.

[0171] In the third embodiment, the colorimetric sensor 3 which is an optical module incorporating the optical filter device 600 of the first embodiment described above, and the colorimetric device 1 which is an electronic device incorporating the optical filter device 600 will be described.

[0172] [Outline configuration of colorimetric device]

[0173] Figure 8 It is a block diagram showing a schematic configuration of the colorimetric device 1 .

[0174] The colorimetric device 1 is an electronic device of the present invention. Such as Figure 8As shown, the colorimetric device 1 includes a light source device 2 for emitting light toward an inspection object X, a colorimetric sensor 3 , and a control device 4 for controlling the overall operation of the colorimetric device 1 . In addition, the colorimetric device 1 emits the light emitted from the light sourc...

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PUM

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Abstract

An optical filter device includes a wavelength variable interference filter provided with a movable substrate on which respective electrode pads are provided; a base substrate on which the wavelength variable interference filter is mounted, facing the movable substrate; and a fixing member that is disposed between the movable substrate and the base substrate and fixes the movable substrate and the base substrate. The fixing member is disposed at a position that overlaps the respective electrode pads, in a filter plan view.

Description

technical field [0001] The invention relates to an optical filter device, an optical module and electronic equipment. Background technique [0002] Conventionally, there is known an interference filter in which reflective films are arranged to face each other on opposing surfaces of a pair of substrates with predetermined gaps therebetween. Also, an optical filter device in which such an interference filter is accommodated in a housing is known (for example, refer to Patent Document 1 and Patent Document 2). [0003] Patent Document 1 describes an infrared gas detector (optical filter device) including an assembly (casing) having a plate-shaped base (bottom substrate) and a cylindrical cover. In this case, the peripheral portion of the bottom substrate and one end of the cylinder of the cover are connected by welding or bonding, and a Fabry-Perot etalon (interference filter) is provided between the bottom substrate and the cover. Space. In addition, the interference filte...

Claims

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Application Information

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IPC IPC(8): G02B26/00G01J3/46G01N21/65G01N21/35
CPCG01N21/65G01J3/51G01J3/26G01N2021/317G01N2021/3185G01N2021/1704G01N21/3504G01N21/31G02B5/28
Inventor 斋藤大辅松野靖史
Owner SEIKO EPSON CORP
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