Full-tensor magnetic field gradiometer based on giant magnetic impedance effect

Abstract

The invention discloses a full-tensor magnetic field gradiometer based on the giant magnetic impedance effect. The full-tensor magnetic field gradiometer comprises an X-Y-direction gradiometer body, a Z-direction gradiometer body and signal leads. The X-Y-direction gradiometer body comprises a cross-shaped substrate and a giant magnetic impedance thin film, the Z-direction gradiometer body comprises a rectangular substrate and a giant magnetic impedance thin film, a junction point at the input end and a junction point at the output end of an electric bridge are connected with the signal leads, and the signal leads are arrayed symmetric with the geometric center of the whole gradiometer as the three-dimensional center. The full-tensor magnetic field gradiometer has the advantages of being high in accuracy, minimized, low in cost, wide in frequency response, rich in information and the like. Due to the design of preparing a three-dimensional structure through planar thin films, the problem of space consistency of the full-tensor magnetic field gradiometer based on the giant magnetic impedance thin films is solved, and the magnetic field gradient measuring sensor with the size at the chip level is designed for the first time.

Description

technical field [0001] The invention relates to a full tensor magnetic field gradiometer based on giant magneto-impedance effect, belonging to the technical field of gradiometers. Background technique [0002] The so-called full tensor vector magnetic field gradient refers to the amount of change of the three components of the magnetic field vector along the direction of the three-dimensional space base. The measurement of the full tensor vector magnetic field gradient information is composed of a magnetic sensor as a basic unit through a reasonable spatial arrangement and an appropriate connection. According to the measurement principle of the magnetic field, it can be divided into Hall effect, magnetoresistance effect, giant magnetoresistance effect, giant magnetoresistance effect, nuclear precession, superconducting quantum interferometer (SQUID) and so on. Due to the limitations of the principle, the full tensor magnetic field gradiometer based on the Hall effect is gre...

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Problems solved by technology

[0017] The purpose of the present invention is to solve the shortcomings of traditional gradiometers such as large size, low precision, low requirements for the use environment and difficulty in measuring the full tensor magnetic field gradient, and propose a full tensor magnetic field gradiometer based on the giant magnetoimpedance effect. The huge impedance change produced by the material under the action of a magnetic field is a high-sensitivity, micro-sized full sheet made by converting the impedance change caused by the magnetic field into a voltage signal through a dual-arm differential Wheatstone bridge combined with thin-film micromachining technology magnetic field gradiometer

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