A planar two-dimensional time grating displacement sensor

Abstract

The invention proposes a planar two-dimensional time grating displacement sensor, which is composed of two parts, a fixed array surface and a dynamic array surface arranged in parallel and oppositely up and down. The fixed array is composed of a base of the fixed array and excitation coils arranged on the surface of the base of the fixed array; the moving array is composed of the base of the moving array and the induction coil arranged on the surface of the base of the moving array. Using a single moving array surface to obtain magnetic signals at different positions on a fixed array surface through the principle of electromagnetic induction, using the theory of space-time coordinate transformation, the magnetic signal (spatial information) is converted into an electrical signal (time information) for processing, so as to obtain a two-dimensional space displacement. The present invention does not need to vertically install two linear displacement sensors, does not need binary optical devices prepared by complicated processes, and does not need complicated optical path design, and adopts ordinary semiconductor processing technology to prepare the dynamic array surface and the fixed array surface, so it has simple structure, Low cost, strong resistance to oil dust and shock vibration.

Description

technical field [0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a plane two-dimensional time grating displacement sensor. Background technique [0002] There are currently two types of sensors for plane two-dimensional displacement measurement. One is to install two linear displacement sensors vertically with a relative difference of 90° on the plane to obtain the plane two-dimensional linear displacement respectively, and the other is to use a single sensor Get the displacement of the two dimensions of the plane at the same time. Installing two linear displacement sensors vertically will bring Abbe errors to the measurement system, and the positioning accuracy of the clamping has a great influence on the measurement results, and at the same time occupies a large space, which is not conducive to small space measurement. Existing planar two-dimensional displacement sensors include two-dimensional gratings and...

AI Technical Summary

Problems solved by technology

Installing two linear displacement sensors vertically will bring Abbe error to the measurement system, and the positioning accuracy of the clamping will have a great influence on the measurement results, and occupy a large space at the same time, which is not conducive to small space measurement

Existing planar two-dimensional displacement sensors include two-dimensional gratings and two-dimensional capacitive gratings. The measurement accuracy of two-dimensional gratings depends on the manufacturing accuracy of binary optical devices, and the complex optical path design and manufacturing process make the cost higher

At the same time, the two-dimensional grating has poor resistance to oil, dust and shock vibration

The measurement range of the two-dimensional capacitive grid is small, and because the dielectric constant of the capacitor is easily affected by the temperature, humidity, oil and dust in the external environment, the sensor's protection ability is poor

However, the current time grating displacement sensor can only measure one-dimensional space (linear displacement or angular displacement), and cannot realize two-dimensional linear displacement measurement on a plane

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