Novel ZnO-based thermoelectric thin film and preparation method thereof

Abstract

The invention discloses a novel ZnO-based thermoelectric thin film and a preparation method thereof. The novel ZnO-based thermoelectric thin film is a ZnO thermoelectric thin film codoped by Al and Ti, the chemical formula of which is Zn(1-x-y)AlxTiyO (X is greater than or equal to 0.005 and less than or equal to 0.04 and y is greater than or equal to 0.005 and less than or equal to 0.04). Ti is introduced on the basis of the Al-doped ZnO thermoelectric thin film to be used as a second doping element. The conductivity of the thermoelectric thin film codoped by Al and Ti is remarkably improved. In addition, as Ti is introduced, the effective state density of the thermoelectric thin film is improved, so that the high temperature seebeck coefficient is also further improved. According to the invention solves, the problem that the conductivity and the seebeck coefficient of the thermoelectric thin film cannot be improved at the same time are solved. The novel Zn(1-x-y)AlxTiyO thermoelectric thin film both has great high temperature conductivity and seebeck coefficient, so that the thermoelectric thin film has a good power factor. The novel Zn(1-x-y)AlxTiyO thermoelectric thin film disclosed by the invention has an excellent thermoelectric performance and has a wide application prospect in the high temperature thermoelectric field.

Description

technical field [0001] The invention discloses a novel ZnO-based thermoelectric thin film and a preparation method thereof, which belong to the cross-technical field of new materials and new energy, and particularly relate to a novel ZnO-based thermoelectric thin film. 1-x-y Al x Ti y Magnetron sputtering preparation method of O thermoelectric thin film. Background technique [0002] With the rapid development of society and industrialization, the problem of energy crisis and environmental pollution is becoming more and more severe, and it is urgent to actively develop and use renewable energy and clean new energy. Thermoelectric materials are new energy materials that can directly convert heat and electricity into each other. Thermoelectric generators made of thermoelectric materials can convert exhaust heat from automobile exhaust and waste heat from thermal power plants, waste incinerators and other factory processes into electrical energy. Thermoelectric power genera...

AI Technical Summary

Problems solved by technology

However, when the conductivity of ZnO film is generally improved by doping, its Seebeck coefficient will be reduced, and it is difficult to increase the conductivity and Seebeck coefficient of ZnO film at the same time, which limits the thermoelectric power factor of ZnO film. Further improve

However, there are very few reports on the preparation of new ZnO-based thermoelectric films by simultaneous doping of two or more metal elements, especially the introduction of Ti as the second doping element on the basis of Al-doped ZnO thermoelectric films to prepare new ZnO-based thermoelectric films. no report

Images