Device for detecting PM2.5 particulate matters based on disc micro-machine resonator

Abstract

The invention discloses a device for detecting PM2.5 particulate matters based on a disc micro-machine resonator and provides a novel mass method detection mechanism of PM2.5 particulate matters based on a planar resonant mode of an aluminum nitride disc resonator. The novel mass method detection mechanism is used for detecting concentration of PM2.5 particulate matters in air by detecting change of resonant frequency of the disc resonator under the condition of deposition particulate matters. An electrostatic driving and absorbing device of PM2.5 particulate matters in air, a particulate matter filtering device, a mass method detecting micro-machine sensing unit are manufactured by using an MEMS (Micro-electromechanical System) manufacturing and integrating process based on the detection mechanism; the structures are integrated in a micro integrated encapsulation unit to form the device for detecting PM2.5 particulate matters so as to realize high-precision and quick detection of the PM2.5 particulate matters in air; micro-machine devices manufactured by using the MEMS process are used in the device for detecting PM2.5 particulate matters, so that the size and the power consumption of the detection device are reduced, the microminiaturization and the integration of the detection device are realized, the detection precision and the detection speed of the PM2.5 are improved and the resonance performance and the detection precision reliability are improved.

Description

Technical field: [0001] The invention relates to a PM2.5 air suspended particle detection device using an aluminum nitride disc micromechanical resonator. The invention belongs to the field of microelectromechanical system device application and air environment monitoring equipment. Background technique: [0002] Air particle concentration monitoring is an important part of air pollution monitoring and prevention work, and is an important work content for building a people-oriented environment-friendly society. Air pollution with PM2.5 high-concentration fine particle pollution as the main form seriously threatens public health, deteriorates public perception and residents' living standards, and has a negative impact on the national economy. Air pollution has a potential long-term risk of harm. The incubation period is long and the impact is eliminated. Difficulties will cause immeasurable losses to my country's social development and economic construction in the future. Th...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved in the present invention is to use a device constructed of micro-electromechanical system devices to detect the concentration of PM2.5 airborne particulate matter with high-precision mass method, and at the same time solve the problem of large volume and high power consumption of the existing PM2.5 mass method detection equipment. Defects of low precision and low integration

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