Silicon slice ejection mechanism
A silicon wafer and ejector pin technology, which is used in photolithography process exposure devices, microlithography exposure equipment, etc., can solve problems such as silicon wafer slippage, and achieve the effect of ensuring effective adsorption and improving motion control accuracy.
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[0025] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be noted that all the drawings of the present invention are in simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0026] Please refer to figure 1 , and combined with Figure 2~4 , the present invention provides a silicon wafer ejection mechanism, comprising: a base 10, a driving mechanism 20, a guide mechanism 30, a connecting plate 40 and an ejection pin 50, the driving mechanism 20 is fixed on the base 10, the The pushing pin 50 and the guide mechanism 30 are fixed on the connecting plate 40 . Preferably, the wafer pushing mechanism further includes a flexible suction cup 60 , the flexible suction cup 60 is arr...
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