Semiconductor laser device with high-power and high-beam-quality lasers

A semiconductor and high-beam technology, which is applied to the device for controlling the output parameters of the laser, the structure of the optical resonator, etc., can solve the problems of affecting the quality of the laser beam, the ineffective application, and the deterioration of the beam quality, so as to expand the application range and reduce the size of the laser beam. Spot, improve the effect of the mode

Active Publication Date: 2014-06-25
华芯半导体科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as the output power of the laser increases, factors such as thermal effects will gradually be amplified, thereby affecting the beam quality of the laser. Therefore, the beam quality and power of the laser have always been in opposition to each other. When developing a laser, the pros and cons of practical applications must be weighed. A trade-off between these two parameters
[0003] Compared with other types of lasers (such as gas lasers and solid-state lasers), semiconductor lasers have higher electro-optical efficiency (no fiber coupling loss or secondary pump loss), low cost (no expensive high-power energy transmission fibers), etc. advantages, but its beam quality will seriously deteriorate with the increase of laser output power, how to effectively expand the output power of semiconductor lasers under the premise of maintaining beam quality has always been a research hotspot in this field
[0004] Semiconductor laser array (bar) technology is a very convenient semiconductor laser power expansion technology. Its principle is to arrange several semiconductor light-emitting units in parallel on the substrate so that the output power of the laser increases linearly with the number of light-emitting units. However, due to The near-field wavefront of the laser beam obtained by this method is divided, so the beam quality is very poor, and it cannot be effectively applied to technical fields such as fiber coupling, welding, and cutting that require high-beam quality lasers.

Method used

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  • Semiconductor laser device with high-power and high-beam-quality lasers
  • Semiconductor laser device with high-power and high-beam-quality lasers

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Embodiment 1

[0023] figure 1 The structure and optical path of a semiconductor laser with high power and high beam quality laser according to the embodiment of the present invention are shown. In this embodiment, the semiconductor gain medium is (InGa)(AsP) / InP, and its semiconductor gain element 1 contains 19 active gain regions, each of which is cone-shaped to reduce its The transverse mode of the output laser results in better beam quality. The rear surface is coated with a high reflectance film to 940nm±5nm, and the front surface is coated with a high transmittance film to 940nm±5nm. The coupling output mirror 4' is a concave mirror coated with a film with a transmittance of 80%. The light beam emitted by the active gain area passes through the cylindrical lens 2a and the spherical lens 2b to collimate the fast axis and the slow axis respectively, and then is collimated by the spherical lens 2b. Focused on the blazed grating 3, after being reflected, the light beam is partially trans...

Embodiment 2

[0028] figure 2 It shows the structure and optical path of the semiconductor laser with high power and high beam quality laser in the second embodiment of the present invention. In this embodiment, the semiconductor gain medium is (InGa)(AsP) / InP, and its semiconductor gain element 1' contains 19 active gain regions, and each active gain region is conical in shape to reduce It outputs the transverse mode of the laser light, resulting in better beam quality. The rear surface is coated with a high reflectance film to 940nm±5nm, and the front surface is coated with a high transmittance film to 940nm±5nm. The coupling output mirror 4 is a flat mirror coated with a film with a transmittance of 80%. The light beam emitted by the active gain area is collimated by the microlens 5a, focused by the spherical lens 5b and irradiated onto the blazed grating 3', and then coupled The output mirror 4' partly transmits the output and partly feeds back the oscillation. If the first-order di...

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Abstract

Disclosed is a semiconductor laser device with high-power and high-beam-quality lasers. An outer resonant cavity is constructed in the outer portion of a semiconductor booster element, and a collimation optical element, a spectral dispersion element and a coupling output mirror are sequentially arranged in the outer resonant cavity. The semiconductor booster element comprises a plurality of active gain areas which are linearly arranged in parallel, a coating with the high reflectivity on the laser wavelength is plated on one side of each active gain area, a coating with the high transmittance on the laser wavelength is plated on the other side of each active gain area, the collimation optical element is arranged behind the side, plated with high-transmittance coatings, of the semiconductor booster element, and the direction of a central optical axis coincides with the direction of the central optical axis of emitted light beams of the semiconductor optical booster element. The spectral dispersion element is placed behind the collimation optical element with a certain angle, and the coupling output mirror is arranged behind the spectral dispersion element in the beam propagation direction. According to the laser device, the mode of laser shock is improved, and the output power of the laser device is effectively improved on the premise of not affecting the laser beam quality.

Description

technical field [0001] The invention relates to a power expansion technology of an external cavity semiconductor laser, in particular to a semiconductor laser with high power and high beam quality laser. Background technique [0002] Due to its high brightness, good monochromaticity, good collimation and focusing performance, laser has been widely used in scientific research, military defense, industrial processing, astronomical observation and information dissemination and other fields. The beam quality of the laser is a parameter that describes the focusing and collimation capabilities of the laser during propagation. A laser with high beam quality will get a smaller spot after focusing and a smaller far-field divergence angle after collimation. Therefore, in practice In applications, lasers with high beam quality have always been the direction people are pursuing. However, as the output power of the laser increases, factors such as thermal effects will gradually be ampli...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/14H01S5/06
Inventor 邱运涛尧舜曹银花王智勇秦文斌
Owner 华芯半导体科技有限公司
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