Control method for controlling ellipsometer by using real-time system and real-time system

Abstract

Since all the conventional methods for controlling measurement of an ellipsometer are implemented by using a non-real-time system, each component of the ellipsometer cannot be controlled in real time, leading to delay in data acquisition, low measuring efficiency and low integrated working difficulty in the ellipsometer. The invention provides a control method for controlling an ellipsometer by using a real-time system and a corresponding real-time system. The method comprises the following steps: i, receiving an instruction from the outside; ii, controlling a polarizer (2) and / or a polarization verifier (3) of the ellipsometer through a motion control card (5) by using a motion control module; iii, controlling a detector (4) in the ellipsometer by using a detection control module according to the instruction, wherein the motion control module and the detection control module run concurrently in real time. According to the embodiment of the invention, the measuring control instantaneity and measuring control accuracy are ensured. Moreover, in the real-time system, a response can be made to an instruction from the outside without delay.

Description

technical field [0001] The invention relates to the control in the field of optical measurement, especially for the control of spectroscopic ellipsometer measurement. Background technique [0002] A spectroscopic ellipsometer is an optical measurement device used to probe film thickness, optical constants, and the microstructure of materials. The absence of contact with the sample, the absence of damage to the sample and the absence of a vacuum make the ellipsometer an attractive measurement device. [0003] The ellipsometer involves the main components of a light source, a polarizer with a variable polarization angle, a polarizer with a variable polarization angle, and a detector. Among them, the polarizer, polarizer and detector need to be controlled to achieve optical measurement at a specific polarizing angle, polarizing angle and specific detection time. Usually, suppliers of ellipsometers generally only provide control support for non-real-time systems. Due to the u...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the technical problems of real-time measurement and low efficiency, the inventive idea of ​​the present invention is: first, use a real-time system to control the cooperative work of all parts of the ellipsometer to realize the measurement function

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