Pin type piezoelectric solid wave mode matching gyroscope

Abstract

The invention provides a pin-type piezoelectric gyroscope for matching solid fluctuation modes. The pin-type piezoelectric gyroscope comprises a cuboid harmonic oscillator with a square top surface, an internally-hollow double-square-frame-shaped cylindrical frame, four thin beam connected with the cuboid harmonic oscillator and the double-square-frame-shaped cylindrical frame, two drive electrodes symmetrically distributed at the centre of the top surface of the cubiod harmonic oscillator, four detection electrodes symmetrically distributed at the four corners of the top surface of the cubiod harmonic oscillator, and six pins extensionally distributed along the double-square-frame-shaped cylindrical frame, wherein the cubiod harmonic oscillator is located at the centre of the hollow part of the double-square-frame-shaped cylindrical frame and connected with the double-square-frame-shaped cylindrical frame by the four thin beams; the drive electrodes and the detection electrodes are connected to the pins by a metal connection wire through the thin beams. The pin-type piezoelectric gyroscope provided by the invention has the characteristics of being simple in structure, convenient to machine, small in size, high in Q value and the like, and is beneficial to package.

Description

technical field [0001] The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to a pin type piezoelectric solid wave mode matching gyroscope. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and ...

AI Technical Summary

Problems solved by technology

[0005] This technology has the following disadvantages: the structure of the micro-gyro resonator of the spring mass system is fragile, which limits its application in many shock-resistant conditions; the processing technology of the gyro is relatively complicated, and the processing cost is high, which is not suitable for mass production and Encapsulation; the frequency split between the gyro drive mode and the detection mode is large, resulting in a large bandwidth of the gyro, and it is difficult to improve the quality factor; the gyro noise is large, and the generated signal is small, which is not easy to improve the accuracy of detection

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