High temperature secondary electron detector collection components and high temperature scanning electron microscope

Abstract

The invention provides a high-temperature secondary electronic detector collection assembly. The high-temperature secondary electronic detector collection assembly comprises a standard secondary electronic detector collection assembly body and a light insulating sleeve which can block visible light and infrared light, wherein the standard secondary electronic detector collection assembly body is sleeved with the light insulating sleeve, one end of the light insulating sleeve is a port end suitable for being connected with a light guide pipe joint, and the other end of the light insulating sleeve is an electron inlet end. In the high-temperature secondary electronic detector collection assembly, the standard secondary electronic detector collection assembly body is sleeved with the light insulating sleeve which can block the visible light and the infrared light which are emitted by a sample at a high temperature so that the standard secondary electronic detector collection assembly body can be prevented from absorbing the visible light and the infrared light to generate white spots, and it is guaranteed that images generated by the standard secondary electronic detector collection assembly body can normally reflects changes of the surface of the sample at the high temperature. A high-temperature scanning electron microscope with the high-temperature secondary electronic detector collection assembly further comprises a thermal insulating objective lens protective assembly, and thermal radiation generated by the sample at the high temperature is prevented from affecting performance of a pole shoe below an objective lens.

Description

technical field [0001] The invention relates to the field of electron microscopes, in particular to a high-temperature secondary electron detector collection assembly and a high-temperature scanning electron microscope with the high-temperature secondary electron detector collection assembly. Background technique [0002] In the field of material science, in order to better understand the relationship between the properties of materials and the microstructure, it is a common method to observe the morphology and silk structure of materials by using electron microscopes, such as scanning electron microscopes (scanning electron microscopes for short). research tools. Scanning electron microscopes are based on the interaction of electrons with matter. When a beam of high-energy incident electrons bombards the surface of a material, the excited region will generate secondary electrons, Auger electrons, characteristic X-rays and continuum X-rays, backscattered electrons, transmit...

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Problems solved by technology

[0005] For this reason, the technical problem to be solved by the present invention lies in the high-temperature scanning electron microscope in the prior art. The sample produces a large amount of infrared light and visible light at high temperature, which causes the signal collected by the standard secondary electron detector collection assembly to be too strong, thereby causing The image detected by the scanning electron microscope is a white spot, and the change state of the sample surface at high temperature cannot be observed normally, and then a high-temperature secondary electron detector collection component that can eliminate the white spot is provided, and it can observe the high-temperature sample at a high temperature high temperature scanning electron microscope

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