Magnetohydrodynamic micropump

Abstract

The invention discloses a magnetohydrodynamic micropump which is small in size and can be integrated with a portable chip. The magnetohydrodynamic micropump comprises a substrate, wherein a flat type electromagnet is arranged on the lower surface of the substrate; a matrix is arranged on the upper surface of the substrate; the matrix is etched with a microchannel and a liquid storage tank which is communicated with the microchannel; electrodes are arranged on the two sides of the microchannel; the electrodes are sputtered on the upper surface of the matrix; the magnetohydrodynamic micropump further comprises a packaging layer for sealing the microchannel; a liquid injection hole and an electrode access hole are formed on the packaging layer. The flat type electromagnetic is used to generate magnetic field on the magnetohydrodynamic micropump, which substitutes the existing three-dimensional electromagnetic as a magnetic field source, so that the manufactured magnetohydrodynamic micropump is small in size, easy to be microminiaturized, and can be integrated with the portable chip. Furthermore, the flat type electromagnet is simpler to be processed, so that the processing and manufacturing cost of the magnetohydrodynamic micropump can be reduced. The magnetohydrodynamic micropump can be suitable for being promoted and applied in the non-mechanical type micropump field.

Description

technical field [0001] The invention relates to the field of non-mechanical micropumps, in particular to a magnetic fluid dynamics micropump. Background technique [0002] With the maturity of MEMS technology, the production cost of miniaturized devices is gradually reduced, and components with multiple functions can be integrated on the same chip, which makes miniaturized devices more and more popular among users. Microfluidic devices are widely used in analytical chemistry, medical diagnosis, drug sustained release, genomics, proteomics and other research fields. They have the advantages of less reagent consumption, low pollutant emission, fast chemical reaction speed, precise control of reaction, and portability. . From 2005 to 2011, the market value of the microfluidic field grew at an annual rate of 16%. By 2011, the market value of the entire microfluidic device had reached 5 billion euros. As an important part of microfluidic devices, micropumps are used to realize ...

AI Technical Summary

Problems solved by technology

The electromagnet structure of the existing MHD micropumps usually adopts three-dimensional electromagnets, and the three-dimensional electromagnets are relatively large in size, which makes the MHD micropumps larger in size, difficult to miniaturize, and cannot be combined with portable Chip integration, and the processing of three-dimensional electromagnets is complex, which also makes the processing and manufacturing costs of MHD micropumps relatively high

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